CMP

Filmetrics Applications (Thickness Measurement) - CMP

Filmetrics F80 Thickness Imaging products are used to measure oxide, STI, and metal CMP processes.  Dielectric removal rate, remaining dielectric thickness and uniformity, erosion, and residual oxide on STI are common applications.  CMP consumable suppliers use the F80-t tabletop system to quickly characterize CMP processes to shorten their slurry and pad development cycle.

Filmetrics F40 and F42 systems are also used in CMP process development, performing dielectric film thickness and erosion measurements.

Premier Solutions Pte Ltd / Filmetrics Applications (Thickness Measurement / Thin Film Measurement ) - CMP