CMS-18 & CMS-24

Performance-oriented design for advanced university, industrial, and government lab R&D applications.

Features

• 18" diameter x 15" wide cylindrical chamber (CMS-18™)
• 24" diameter x 15" wide cylindrical chamber (CMS-24)
• Available with up to six source ports (standard)
• Available with up to six TORUS Magnetron Sputtering Sources
• Available with multi-pocket electron beam evaporation source
• Accommodates substrates up to 8" (CMS-18 up to 6")
• Available with 3 cm filamentless ion source

Lesker CMS-18 & CMS-24