CMT-SR2000N

4 Point Probe System / Sheet resistance system

Fully automatic system to measure Sheet Resistance and Resistivity of Silicon Wafer.  This system can be operated by itself, furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analyses.

1. Features
	XYZ-axis fully automatic system
	Auto & Manual range selection
	Systems for 8" wafer (SR2000N-PV : 156X156mm)
	Perfect remote control by operating software
	Data analysis (2D, 3D map, Data map, etc.)
	ASTM & SEMI quick measurement mode
2. Configuration
	The system consists of the following components.
	4-point probe head unit
	Z-axis robot arm
	Revolution sample stage chuck (XY-axis)
	Membrane keyboard panel
	LCD display window
	Remote control communication port
	Vacuum hose connector (200mmHg)
	Software (Windows 98/XP/NT Ver.)
	Standard accessories
	- Power cable  - Remote control communication cable  - Operating & service guide
3. Specifications
	Sheet resistance measurement
	- Measuring method : Contacted by 4-point probe - Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
	Resistivity measurement
	- Measuring method : Contacted by 4-point probe (input thickness) - Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm
	Current source
	- 10nA to 100mA - DVM 0V to 2,000mV
	Measurement accuracy
	- ± 0.5 % (VLSI standard wafer, when 23°C)
	Four-point probe (Jandel Eng.)
	- Pin spacing : 25 mils ∼ 50 mils by 5mil increments - Pin Load : 10 gram/pin ∼ 250 gram/pin - Pin radius : 12.5 micron∼500 microns (polished 2μ diamond) - Tolerance : ± 0.01 mm - Needles : Solid Tungsten Carbide φ0.40 mm
	Operating software
	- Measurement condition creation : Wafer type, measure point interval, etc.  - Save & load : data, wafer type, measure point, etc. - Data analysis : 2D, 3D mapping, data map, etc. - On/Off : Remote, vacuum  - Data & mapping printout
	Measurement mode (S/W)
	-Auto measurement : Point interval designation by user  -Quick measurement : ASTM & SEMI mode -Point measurement : Appointment on wafer by mouse  -Manual measurement : Appointment on wafer by arrow key
4. Specimen
	Wafer : max 8" (SR2000N-PV : 156X156mm)
5. Measuring time
	Approx. 3 ± 1 sec/point
6. Software [Windows 98/XP/NT(Service Pack 4.0)]
	Operating personal computer : IBM PC/AT compatible PENTIUM∼
	Serial Communication(RS232C)
7. Utility requirements
	Power requirements (1 Line)
	- Line voltage : AC 110V or 220V ± 10%  - Electric power : 40 W, 500 mA  - Line frequency : 50 / 60 Hz
	Stage chuck vacuum requirements (1 Line)
	- Vacuum : About 200mmHg (1 Line) - Vacuum hose : Urethane 4mm
8. Outside Dimension
	SR2000N : 254mm(W)×562mm(D)×250mm(H) SR2000N-PV : 270mm(W)×610mm(D)×280mm(H)
9. Operating environment
	Temperature range : 23° ± 1°C
	Relative humidity : 30 % ∼ 70 %
	Avoid placing the system near a source of RFI, vibration and sources of gas.
	Avoid large changes in temperature.