CMT-SR3000

4 Point Probe System / Sheet resistance system

The CMT-SR3000 is a measurement system for Sheet Resistance and Resistivity of a plain rectangle sample such as LCD, ITO, Solar cell, Fuel cell etc.  And it is designed to work for remote functioning to meet automation such as automatic sample loading.  This system is designed for easy operation by a personal computer with exclusive software, and this software has function for various data analyses, mapping and etc.

1. Features
	XYZ-axis fully automatic system
	Automatic range selection
	Perfect remote control by operating software.
	Data analysis (2D, 3D mapping / Diameter scan / Trend chart, etc.)
	Anti Static System
	Glass centering nob
	Glass unload positioning
2. Configuration
	The system consists of the following components.
	4-point probe head unit
	Bridge type XYZ-axis robot
	Sample stage for flat panel
	LED for process signal
	Remote control communication port
	Power switch
	Operating analysis software
	Standard accessories
	- Power cable  - Remote control communication cable  - Operating & service manual
3. Specifications
	Sheet resistance measurement
	- Measuring method : Contacted by 4-point probe - Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
	Resistivity measurement
	- Measuring method : Contacted by 4-point probe(input thickness) - Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm
	Current source
	- 10nA to 100mA - DVM 0V to 2,000mV
	Measurement accuracy
	- ±0.5 % (VLSI standard wafer, when 23°C)
	4-point probe (Jandel Eng.)
	- Pin spacing : 25 mils ∼ 50 mils by 5mil increments. - Pin Load : 10 gram/pin ∼ 250 gram/pin - Pin radius : 12.5 micron∼500 micron (polished 2μ diamond) - Tolerance : ± 0.01 mm - Needles : Solid Tungsten Carbide φ0.40 mm
	Operating software
	- Measurement condition creation : Sample size, measure point interval, test mode, etc.  - Save & load : Data, Sample type, measure point, etc. - Data analysis : 2D, 3D mapping, Data map, etc. - Data & mapping printout
	Measurement mode (S/W)
	- Auto measurement : Point interval designation by user  - Quick measurement : 9, 13, 25 pattern quick mode - Point measurement : Appointment on wafer by mouse - Manual measurement : Appointment on wafer by arrow key
4. Specimen
	- Rectangle type sample size : Customer size
5. Measuring time
	- Approx. 3 ± 1 sec/point
6. Software (Windows 98/XP/NT(Service Pack 4.0))
	Operating personal computer : IBM PC/AT Compatible Pentium
	Serial communication (RS232)
7. Utility requirement
	Power requirements
	- Line voltage : AC 110V or 220V ±10%  - Electric power : 100 W, 500 mA  - Line frequency : 50 Hz
	Air requirements
	- Air 1 Line : About 1 MPa (kgf/cm2)
	System table
8. Outside Dimensions
	SR3000S (370X470) : 650mm(W) × 900mm(D) × 350mm(H)
	SR3000M (550X650) : 700mm(W) × 950mm(D) × 350mm(H)
	SR3000L (600X720) : 800mm(W) ×1050mm(D) × 350mm(H)
	SR3000C : Customer size
9. Operating environment
	Temperature range : 23°± 1°C
	Relative humidity : 30 % ∼ 70 %
	- Avoid placing the system near a source of RFI, vibration and sources of gas. - Avoid large changes in temperature.