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Compact Atmosphere Controlled RTP Furnace with 4" ID Quartz Tube up to 1100ºC - OTF-1200X-4-RTP

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OTF-1200X-RTP-4 is a  compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3". OTF-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. the heating rate of 50ºC/second. 30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. This furnace also can be modified into an RTE, CSS or HPCVD  furnace ( see below application note )
Furnace Structure
  • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
  • High purity fibrous alumina insulation for maximum energy saving.
  • Split cover with Interlock protectioncut the power if lid open during furnace heating process.

Power Input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required)

Heating Elements

  • 8 pcs 1Kw Halogen light tube,  ( Dia. =10mm,  L=300mm, Heated Length =200mm)
  • Standard working life: 2000 hrs.  ( depends on heating rate )
  • The Halogen light tube is consumable.  Please click picture left to order a spare one

Heating Zone

12" length with 4" constant temperature zone within +/-5ºC uniformity

Working Temperature

  • 1100ºC Max. for < 10 minutes
  • 1000ºC Max. for < 20 minutes   (Note: if running longer time, furnace case will > 100°C, must use fan to cool the furnace case from outside)
  • 800ºC Max.   for < 120 minutes
  • 600ºC Max.   for Continuous 

Max. Heating Rate


Cooling Rate

  • Max. Cooling: 60ºC/min (Under vacuum: 200 m-torr), 117ºC/min (under atmospheric pressure) 
  • Lowest Cooling:   10 ºC / minute


K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath

Temperature Controller

  • FA-YD808P-AG temperature controller is included.
  • Proportional–integral–derivative control (PID control) and auto-tune function
  • 30 segments programmed with ramping, cooling and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • Default DB9 PC communication port

Temperature controller (optional)

Quartz Tube & Sample Holder

Vacuum Flange

  • KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and a water-cooling jacket.
  • It only requires water cooling in long-running times at temperatures > 600oC.
  • Circulating water rate: 0.5 m3 /hr.
  • The slide-out flange provides an easier way of loading, unloading the samples and other specific processes needed.
  • Insert-able thermal-couple for accurate measurement. 

Vacuum Pump  (optional)

  • EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package. Click here for the spec of EQ-FYP vacuum pump. 
  • Click here to view other models of pump and package.

Water Cooling  (optional)

  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   
  • Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise, O-ring may melt. 


One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min

Vacuum Gauge

A digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace.

Vacuum Pressure & Gas Fitting

  • Pressure can reach 50 more by using a mechanical vacuum pump with KF25 adapter
  • Pressure can reach 10-4 torr by the molecular pump with KF25 adapter


  •  Flange closed: 1350mm(L) x 330mm(W) x 590mm(H)
  •  Flange opened: 1350mm(L) x 520mm(W) x 740mm(H)

Net Weight

70 kg (150 lbs)


One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control(Optional)

  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipe, record, and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller


Please select the certificate in the options bar:
UL or CSA certificate (UL 61010) is available upon request at extra cost




  • You may combine the RTP furnace with a high vacuum station or gas livery system as a vacuum furnace or CVD system. Click pictures below to see details
  • For achieving a fast cooling rate (< 10ºC/second), you may choose RTP furnace with sliding rail. Please click the picture below to see the details.
  • You may order the pressure control module ( click picture below-right ) to keep the chamber at constant pressure

Application Notes


  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • This furnace also can be modified into an RTE, CSS or HPCVD  furnace with a graphite crucible coated with SiC ( click Pic-left for detail how to set up an RTE processing by DIY )
  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can below.

Operation Instructions


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