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Compact Liquid Vaporization Systems with Temperature and Pressure Control for CVD & DLCVD - LVD-F1

Compact Liquid Vaporization Systems with Temperature and Pressure Control for CVD & DLCVD - LVD-F1

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LVD-F1 is a  precision & cost effective liquid evaporating delivery system for lab scale CVD or DLCVD, which can carry all types of liquids, such as ETOH, SnCl4, TiCl4r, SiHCl3, and Zn(C2H5)2 etc., without worrying about corrosion.  It is an ideal tool for CVD processing of nano wire and film in material research.



Product Structure                
Power Input         
  • 220V 50Hz
  • 2200 W Power consumption
  • 110V is available with a transformer
Liquid Flow Control
  • Precision digital control with +/- 0.5% FS accuracy
  • Flow rate arrange : 0 - 10 ml/minute adjustable  ( min. rate: 0.1 ml/min )
  • The liquid can be soaked from a container automatically. Please click the picture below to order
Heater  & Temperature controller                   
  • Liquid and carrying gas go through an SS316 coil, which is heated by a built-in small furnace up to 550ºC
  • One heating tube is included to prevent output vapor from condensing on tube or flange ( max. temperature 200ºC). The heating tube could be generated as secondary heating to prevent the liquid or gas cooldown while passing through the tube.
Gas flow control
  • Carrying gas (inert gas) is controlled by a precision float flow-meter (200 - 2000 mL/min adjustable). The optional digital mass flow controller is available at extra cost.
  • Pressure gauge built in front panel
  • Two SS needle valves are installed to control gas in and out
  • Vapor Gas outlet tube size:  1/4"OD  SS316
  • Note: 1/4'' PTFE tube, 1/4'' SS tube and beaker are not included, customers need to prepare them according to your own experimental needs.
  • The inert gas tank is required to deliver vapor 
Application Note
  • This system can fit with all MTI tube furnace and CVD furnace, click the picture below to see how, and choose a furnace at " CVD Furnace System" 
Dimension & Weight
  • Heater & Gas Control Unit:   390L  x 420W" x  360H, mm
  • Net weight:  5 Kg
  • CE Certified
  • NRTL or CSA certification is available upon request
Warranty   One year limited and extended warranty available upon request
Operation Video and  Instructions

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