Description
ALD-800X-4-PE is a compact plasma-enhanced (PE) ALD and CVD system with a four high-frequency valve, 4" shower-head, and rotary heatable sample stage, and 300 W RF generator. The smart design makes ALD more cost-effective and affordable.
SPECIFICATIONS:
Control Panel  | - All processing parameters of ALD are controlled by PLC via a 6" touch screen panel, including vapor injecting time, inert gas flow rate, and temperature and rotation speed of sample stage
- 13.56MHZ, 100W max. RF plasma power and auto-matching
- Control one ALD valves with puls duration time and cycling with mico-second precision
- Control two channels gas delivery with ±0.2%F.S via MFC
- Display vacuum pressure
- Other parameters upon request of the customer
- Please click the picture left to see the control interface
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ALD valve  | - One frequency ALD valve
- Max. frequency on/off: 283 HZ
- Min. Pulse time: 10 ms
- Can deliver drying gas or liquid-vapor
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Shower Head   | - Material: Aluminium or Stainless steel
- 4" shower-head with 0.5 mm holes
- 1/4" dia. tube for gas or vapor inlet which connects to ALD valve
- Special design for uniform distribution of gas or vaper
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Sample Stage | - 4" diameter rotary and heatable sample stage
- Speed: 0 - 5 RPM adjustable via the control panel
- Temperature: RT - 700oC programmable via the control panel with +/- 5 ºC accuracy
- Substrate size to be coated: 100 mm in diameter.
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Chamber
 | - Quartz glass tube, 165 mm OD. X 150 mm ID x 250 mm Height
- Please click here to order the Quartz Chamber replacement.
- SS 304 flanges to ensure the vacuum level: 10-5 torr by turbopump and 10-2 by the mechanical pump
- KF 25 vacuum port is built-in
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| Heatable Bubbler | - Two 150 ml Heatable bubblers with temperature controllers are included for carrying precursors
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| Dimension | - L 700 mm×W 700 mm × H 1400 mm
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Vacuum Pump
( optional) | - A vacuum pump is not included, suggest you order a dry pump for the CVD process by click the picture below
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Warranty | One-year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below). |
Compliance | - CE certified and NRTLor CSA certification is available upon request at the extra cost.
 
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Operation Instructions | |
