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Spin Coater

Compact Spin Coater (8K rpm, 4" wafer Max.) w/ 3 Vacuum Chuck - VTC-100A

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Description

 

VTC-100A is a compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.  

 

SPECIFICATIONS:

Structure
  • Aluminum casting case to keep spinning stably
  • The liquid disk made of Polypropylene (PP) to resist most of the corrosive solutions
  • Drainage outlet and vacuum pump connector are on the back panel
  • One filter is included in the standard package. It is used to connect the coater for preventing wastewater flowing into the pump
  • One oil-less vacuum pump is included in the standard package, please click here for specification details.
Chamber  & Vacuum Chuck 
  • Chamber Diameter: 145 mm
  • 3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes (1'', 2'' and 4'')
  • 1 piece of adhesive tape (6'' W x 24'' L) is included  for coating irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction)
  • Mini suction cups are available for the small wafer with less 1" Dia. or substrate with regular  ( 5x5, or 10x10mm) or irregular shape. Please click here to order. at extra cost. ( see picture below right )
                           (Optional; click pic to see demo video)
Vacuum Pump
   
  • One 120L/min Oilless Vacuum Pump is included. Please choose 110V or 220V from the option.
  • Vacuum grade rubber pipe is included for immediate use.
Spin Speed & Time 
  • Digital control panel with TWO programmable segments for different spin times and speeds
  • Spinning speed: 500 - 8000 RPM  
  • Spinning Time: 1 - 60s
Liquid Injecting
  • 20mL syringe is used to contain the coating material
  • The syringe holder height can be adjusted and rotated freely along the support rod
 - Pic 1   - Pic 2     
Input Voltage
  • Spin Coater: 24 VDC with 100 - 240 VAC power adapter, 150W
  • Vacuum Pump: 110VAC or 220VAC please select the voltage in the options bar (10A fuse)
Motor Power 24V DC motor with 150W Max. 
Product Dimensions 13''(L) x 10''(W) x 8.5''(H)
Net Weight 15 kg (33 lbs)
Compliance
  • CE certificated only
  • If you need NRTL certification, please order  VTC-100PA ( click pic below )
Warranty 
  • One year limited with lifetime support
  • Rusting and damage due to improper storage conditions or maintenance are not covered by warranty
Operation Video
           ( video for heatable cover)
Warnings
  • Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues that remain in the bow/base.
  • Turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
Shipping Dimensions 40"(L) x 28"(W) x 24"(H)
Shipping Weight 85 lbs

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