D-Shaped Chamber Sub-System

Based on Lesker successful PVD 75 System platform, this open design system can be tailored to fit your application

Features

• 304 Stainless Steel D-Shaped Chamber, available in 14" and 18" diameters
• Aluminium Door with Large Viewport
• Turbo-molecular Pumping
• Open Aluminium Framework

Options:

• Manual Touch Screen or Computer Controlled Automation
• Cryogenic Pumping
• Accepts Many Standard Component and Deposition Modules

Lesker D-Shaped Chamber Sub-System