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Dual Quartz Tubes (5"/4") & Three Zones CVD Furnace upto 1200C for Graphene Film - OTF-1200X-III-D5-4

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OTF-1200X-5-III-D4 is a dual tube and three-zone tube furnace with max. the working temperature of 1200°C  for growing thin films on metallic foil by CVD, specially designed to make graphene and the flexible electrode for solar or battery electrode.

  • Dual quartz tube:  130 mm Dia (5"). outside tube suspended by 101 mm Dia (4")  tube inside. The metallic foil will be wrapped inside tube surface for CVD reaction
  • Vacuum sealing flanges for the dual tube, which allow reactive gas to go through between two tubes ( 20mm space ) for reaction, and forced air can go through the central tube for fast cooling.
  • Max. Working Temperature:  1200°C   
  • Valve and vacuum gauge is included
  • Please click the picture on the right to see the principal of the furnace

Please click below for a related article:  "Roll-to-roll production of 30-inch graphene films for transparent electrodes "
Furnace structure
  • Three heating zones: (900mm, 36" in total)
    • Zone 1: 300mm  (11.8")
    • Zone 2: 300mm  (11.8")
    • Zone 3: 300 mm (11.8")
  • Max. 25" (625 mm) long with +/- 1°C accuracy if set three zones at the same temperature.
  • Three precision temperature controllers with 30 segment programmable and +/- 1° C accuracy.
  • Max. Working Temperature:  1200°C 
  • Continuous Working Temperature:  1100°C
  • Heating Rate: <= 20°C /min  
  • Constant Temperature Zone: 25" (625 mm) length (Three zones are heating at equal temperature simultaneously)

  •  AC 208-240V Single Phase, 50/60 Hz (40A breaker required).
  • 7 KW  Max.
  • Powder cord is included without a plug.
  • CE certified 
Processing Tubes
  • Two High purity Fused Quartz Tubes included
  • Outside tube: 130mm O.D. x 122 mm I.D. x 1480 mm
  • Inside tube: 102mm O.D. x   94 mm I.D. x 1800 mm
Vacuum sealed flanges
  • One pair of flange made of SS304, which seals tightly between tubes by two high-temperature O-rings (10-2 by the mechanical pump and 10-5 by the molecular pump ). 
  • The flange is built with water cooling jacket. When working temperature over 900°C, it is required to use cooling water. You may either use tap water or use our chilling water circulation at picture below
  • One KF25 adapter is installed on the left flange to connect a vacuum pump.
  • One stainless steel needle valve is installed on right flange (please choose connector at picture below before order)
  • Optional.  You may order a  Compact Liquid Vaporization Systems for better CVD ( Click picture below right )
Thermal Block Placement         
 Optional Copper Foil for Graphene Growth (150m length x 150mm width x 25um thickness) - EQ-bccf-25u
 Furnace Dimension 1030 x 430 x 580 mm  ( not included flange and tube )
Net Weight about 90 kg
Shipping package size after crating 65"x45"x35"
Warranty One year limited warranty for electrical parts. (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipes, record, and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • CE Certified
  • NRTL (UL61010) or CSA certification is available upon request at extra cost.
  • Patten NumberZL-2011-2-0162232.9
Related instruction video
Updated idea
  • You may put the furnace on a 1200 mm length mobile cart ( click picture on left to order )
  • you may order our gas mixing module to support the furnace and deliver multi-gas to the dual tube furnace

Click here to learn the installation of a gas regulator
  • All quartz tube furnaces  are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • For the use of flammable gasses such as H2 and CH4, please consult with MTI technical team for safety measures. We Strongly suggest that the furnace needs to be operated inside a fume hood with an H2/CH4 leaking detector installed.

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