Dual Tube (100/80 mm) - CVD Sliding Furnace and 4 Channel Gas & Vacuum System - OTF-1200X-4-C4-SL-UL

• High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
• Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
• Sliding flange assembly is made of stainless steel.
• Dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside the tube surface for CVD reaction
• Heating zone length: 440mm
• Constant temperature heating zone length: 120 (±1°C) @400~1100°C

• High purity Al2O3 insulation chamber ensures excellent temperature uniformity.
• Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
• Max. Temperature: 1200°C and continuous temperature: 1100°C.
• Two Heating Zones controlled separately:
  Dual direction sliding rails to ensure the furnace moves smoothly.
• 200mm length for each heating zone, 400mm total heating length
• 250mm constant temperature zone if the two zones heating at the same temperature
• 500oC max temperature difference if place a thermal block in between two-zone

Power
10 feet power cable with no plug (ask a licensed electrician to do the plug)

• Max. Temperature: 1100°C
• Continuous Temperature: 1000°C

• High purity quartz tube:
  Two pairs of vacuum-sealed flanges with water cooling jackets and stainless steel needle valves
  
• Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm )
• Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm 

• 1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and space between the outside tube and inside the tube (this space is considered as a reaction chamber).
  • Left side flange: Barb fitting with needle valve as gas inlet, a digital vacuum gauge with measuring range 10^-4 to 1000 torr, water cooling inlet/outlet included
  • Right side flange: Right angle valve with KF25 flange fitting, a vacuum release needle valve, water cooling inlet/outlet included
• 1-2. Leave both ends of the inside tube open for gas cooling.

Left flange (click to enlarge)				Right flange (click to enlarge)

• PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
• Built-in over-temperature alarm and protection allow for operation without any attendant.
• Over-temperature  protection and alarm allow for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• RS485 Communications Port.
  • Advanced Temperature Control (Optional)
  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit. 
  • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of the Eurotherm 3504 temperature controller.
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• 4 precision mass flow controller ( MFC)  with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:
• 4 Gas channels (contact MTI sales if need more)
  • MFC 1: Control range from 0~100 SCCM
  • MFC 2: Control range from 0~200 SCCM
  • MFC 3: Control range from 0~200 SCCM
  • MFC 4: Control range from 0~500 SCCM
• Flowing rate accuracy: ±1% FS
• Gas inlet and outlet: 1/4" Swagelok tube connector
• One 80mL gas mixing tank is installed in the bottom case
• Each gas channel has a stainless steel needle valve for easy on/off  
• The flow rate is adjustable from the MFC panel

• Optional 1:
• Pfeiffer's High Speed (226L/min) Oilless Dry Vacuum Pump, 10E-3 Torr Limit is installed inside a heavy-duty mobile cart. Please click the picture below for more details.
• KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with a precision ball valve.
• 10E-2 Torr vacuum can be achieved inside the processing tube
• A digital vacuum gauge is installed on the left side flange. 

             

• Optional 2:
• The heavy-duty Double Step Rotary Vane Vacuum Pump with Exhaust Filter & KF-D25 Inlet is installed inside a heavy-duty mobile cart. Please click the picture below for more details.
• 6.7x10-4 mbar vacuum can be achieved inside the processing tube
• A digital vacuum gauge (made in the USA) is installed on the left side flange. Please click the second picture below for more details
• For vacuum level to 10^-5 torr, please order below mobile turbopump

• Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature:
• Water cooling flanges require >= 10L/M water flow.
• You may use tap water as the coolant, but we strongly suggest you use a recirculating water chiller for environmental considerations. Please click the thumb left to order the water chiller at extra cost

• You can build up an 80mm Dia. single tube reaction by ordering extra sealing flanges and install them onto the interior tube:
• Left side flange: Barb fitting with needle valve as gas inlet and 1/4'' feedthrough fitting for the customer to insert a measuring sensor (e.x. an insertable thermocouple for temperature calibration)
• Right side flange: KF25 fitting with mechanical gauge and vacuum release valve

                 (click to enlarge the picture)    click here to choose a crucible

• Furnace: 550 x 380 x 520mm
• Bottom mobile case x 2: 600 x 600 x 600mm (one for gas mixing station and the other for vacuum pump)

• Shipping Weight: ~800 lb
• Shipping by freight with three pallets
• The crating fee will be applied

• Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
• Labview Based Temperature Control System (EQ-MTS01) enables a user to edit temperature profiles, manage heat-treatment recipe, record and plot data for MTI furnaces.
• A wireless remote control provides up to 300 meters of operating range.
• The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
• Note: The software is only compatible with MTI’s Yudian Temperature Controller

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• CE Certified
• NRTL (UL61010) or CSA certification is available upon request at extra cost.

• Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
• The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
• Click here to learn How to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
• One slide stopping clamp is included for holding the position of the furnace.
• After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can below.

• Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!