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Dual-Tube (11"/10") CVD Furnace (1200ºC Max.) for Large-Area Graphene Growth -GSL-1100X-III-D11

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GSL-1100X-III-D11 is a three-zone dual tube furnace with max. working temperature of 1200°C. Dual-tube design enables large area (~7000 cm^2) CVD film growth on the metallic foil wrapped on the inner tube surface. Tube extractor allows the operator easily remove the inner tube without damaging the film products and be ready for the next step of film transfer. It is an ideal tool for producing graphene sheet or flexible electrodes of energy storage devices. Please click below for a related article:  "Roll-to-roll production of 30-inch graphene films for transparent electrodes "
  • Dual quartz tube design:  280mm (11") Dia. outer tube with 254mm (10") Dia. inner tube. The metallic foil can be wrapped on the surface of the inner tube for CVD film growth.
  • Manually operated tube extractor enables easy removal of the inner tube and is ready for the later film transfer.
  • 36'' Long constant heating zone provides over the 7000cm^2 tubular surface for large area CVD growth of graphene on metallic substrates. 
Heating Zones & Temp. Control
  • Three heating zones: (1230mm, 48" L in total)
    • Zone 1: 410mm  (16")
    • Zone 2: 410mm  (16")
    • Zone 3: 410 mm (16")
  • Constant Heating Zone: Max. 36" long with +/- 5°C accuracy if set three zones at the same temperature.
  • PID temperature controller with 30 segments programmable and +/- 1° C accuracy. Build-in Overtemp. and TC failure protections.
  • High-quality K type thermocouples from Omega.
Working Temperature 
  • Max. Working Temperature:  1200°C  < 1 hour
  • Continuous Working Temperature:  1100°C
Heating Rates
  • Max. 10°C /min  (RT~800°C)
  • Max. 5°C /min (800~1100°C)
  • AC 220VAC Three Phase, 50/60 Hz 
  • 24 KW  Max.
  • Powder cord is included without a plug
Processing Tubes Two High purity Fused Quartz Tubes are included:
  • Outside tube: 280mm O.D. x 270 mm I.D. x 2070 mm L
  • Inside tube: 254mm O.D. x  244 mm I.D. x 2310 mm L
Vacuum sealed flanges
  • A pair of SS304 flange seals dual tubes in the enclosure tightly via a set of high-temp. silicon o-ring gaskets (please click the picture on the left for details.)
    • KF25 port with needle valve is mounted on the right flange for vacuum pump connection and manual pressure relief
    • Right flange can be attached to the tube extractor
    • 1/4'' tube compression fitting on the left flange for gas feeding
    • Mechanical pressure gauge on the left flange for tube pressure monitoring
    • Thermoblocks attached to the flanges established a thermal barrier for the constant heating zone 
  • Vacuum Compatibility: 10^-2 torr by the mechanical pump; 10^-4 torr by the molecular turbo pump. Please click underline to order vacuum pumps from MTI Corp. 
Tube Extractor
Manual operating tube extractor can be attached to the right flange to retrieve the 10'' Dia. inner tube with film products upon the completion of the process. The picture on the left illustrates the operating procedure.
Furnace Dimension
5400L x 770W x 1500H mm  ( Include the tube extractor )
Net Weight ~600 kg
Shipping Weight & Dimensions 1) 1500 lbs, 97"x39"x74"
2) 1800 lbs, 123"x39"x80"
Warranty One year limited warranty for electrical parts. (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty)
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details )
Related instruction video


  • All quartz tube furnaces  are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • For the use of flammable gasses such as H2 and CH4, please consult with MTI technical team for safety measures. We Strongly suggest that the furnace needs to be operated inside a fume hood with H2/CH4 leaking detector installed.
Optional Accessories
  • Copper Foil for Graphene Growth (150m length x 150mm width x 25um thickness) - EQ-bccf-25u, please click pic.1 for details.
  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low. Please click pic.2 for details.
  • You may order a  Compact Liquid Vaporization Systems for better CVD, click pic.3 for details.

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