Phone(+65) 6284 3818 | sales@premier-sols.com | Enquriy |
OTF-1200X-II-F3LV is a CE certified and ready to pass UL/CSA certification Dual Zone Split Tube Furnace with 80mm diameter quartz tube, mechanical vacuum pump, and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.
SPECIFICATIONS
Furnace Construction |
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Power Consumption | 2.5 KW |
Input Voltage | AC 208-240V Single Phase, 50 or 60 Hz |
Maximum Temperature | 1200 °C |
Continuous Working Temperature | 1100 °C |
Heating Zone Length | Two Zones: 200 mm (8") for each zone and total 400 mm heating zone length |
Constant Temperature Zone |
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Max. Heating Rate | <= 20 °C /min (20 °C /min below 800°C; <5 °C /min over 1000°C) |
Temperature Accuracy | +/- 1°C |
Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Temperature Controllers |
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Tube Size and Materials | |
Digital Vacuum Gauge |
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Vacuum Sealing Flanges |
Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present. |
Oxygen Monitoring | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation at extra cost. Please click the picture below to learn more: |
156 L/m Double Stage Rotary Vane Vacuum Pump with Exhaust Filter (220V single phase) and stainless steel hose tube are included for connecting to tube furnace. Max. archivable vacuum pressure is 10^-2 torr.
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr. | |
2) Compact direct read flow meter, 16-160 cc/min. 3) Compact direct read flow meter, 25-250 cc/min.
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Valves | Four stainless steel valves are installed in the side panel of a mobile cart to control mixing of three inlet gases separately |
Dimensions |
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Net Weight | ~ 60 kg |
Shipping Weight | 750 lbs |
Shipping Dimensions | Three Pallets: 48"x40"x45" each |
Warranty | One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
Laptop, software & WiFi Control (Optional) |
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Compliance |
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Application Notes |
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Operation Instructions | ![]() |