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Enquriy
 E-beam Evaporator

E-beam Evaporator

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Description

Features

  • Compact, space-saving design
  • Rate & thickness control
  • Source & substrate shutters
  • Multi-source organic evaporation
  • Ergonomic to operate, easy to clean
  • Compatible with most standard deposition sources
  • Configured for your application

Specifications

  • Chamber Unit
    • Material : Stainness304 / Aluminum
    • Chamber size : 450x450x600
    • Front Open Door with Window(shutter)
    • ¼”VCR vent port
    • Pumping port/gauge/spare port
    Pumping Unit(Gauge)
    • Osaka turbo pump 1100l/s ISO200
    • inlet flange
    • 600l/m Rotary pump
    • Ion gauge/convection gauge
    • ATM sensor Option : Load-lock unit/Cryo pump
    Substrate Unit
    • Material : Inconel600(High temp)
    • Water cooling stage : OFHC
    • Max Sample size : 6inch
    • Option : Up/down / Heating Max temp 400C/Rotation by motor/Bias for Cleaning
    Control Unit
    • System Manual operation
    • Option : Semi-auto Operation system· 15inch Touch panel control· System reciepe· Interlock(Water/Pneumatic air)· Data loading
    E-beam evaporator Unit
    • E-beam Power supply 6kW with Sweep controller / Remote control unit
    • E-Gun Boat(1~6 multi pocket capacity : 4~7cc)
    • W, Mo source evaporation boat install
    • Max current 300A( Electrical rod - cooling)
    • Pneumatic shutter for source
    Consumable Parts
    • W-boat
    • thickness sensor
    • Vacuum sensor
    • Oil in Rotary Oil Pump
    • O-ring
    • Window
    • Heating module
    • Crucible

Facility Requirements

Electrical power 220VAC 3ph 50A
Compressed air 0.5~0.6Mpa
Compressed air input size 6 mm one touch fitting
Cooling water in/out 1/2" lok fitting (ø16)
cooling water flow Air temp 10liter/min
cooling water pressure 0.1~0.2Mpa
Pump exhaust NW40
Rotary pump capacity 550liter/min
Dry pump exhaust Power thermal 2channel
Dry pump capacity E-beam 4cc 4channel

 

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