Phone

(+65) 6284 3818

Email

sales@premier-sols.com

Enquriy
 E-beam Evaporator

E-beam Evaporator

0.0/5 rating (0 votes)

Description

Features

  • Compact, space-saving design
  • Rate & thickness control
  • Source & substrate shutters
  • Multi-source organic evaporation
  • Ergonomic to operate, easy to clean
  • Compatible with most standard deposition sources
  • Configured for your application

Specifications

  • Chamber Unit
    • Material : Stainness304 / Aluminum
    • Chamber size : 450x450x600
    • Front Open Door with Window(shutter)
    • ¼”VCR vent port
    • Pumping port/gauge/spare port
    Pumping Unit(Gauge)
    • Osaka turbo pump 1100l/s ISO200
    • inlet flange
    • 600l/m Rotary pump
    • Ion gauge/convection gauge
    • ATM sensor Option : Load-lock unit/Cryo pump
    Substrate Unit
    • Material : Inconel600(High temp)
    • Water cooling stage : OFHC
    • Max Sample size : 6inch
    • Option : Up/down / Heating Max temp 400C/Rotation by motor/Bias for Cleaning
    Control Unit
    • System Manual operation
    • Option : Semi-auto Operation system· 15inch Touch panel control· System reciepe· Interlock(Water/Pneumatic air)· Data loading
    E-beam evaporator Unit
    • E-beam Power supply 6kW with Sweep controller / Remote control unit
    • E-Gun Boat(1~6 multi pocket capacity : 4~7cc)
    • W, Mo source evaporation boat install
    • Max current 300A( Electrical rod - cooling)
    • Pneumatic shutter for source
    Consumable Parts
    • W-boat
    • thickness sensor
    • Vacuum sensor
    • Oil in Rotary Oil Pump
    • O-ring
    • Window
    • Heating module
    • Crucible

Facility Requirements

Electrical power 220VAC 3ph 50A
Compressed air 0.5~0.6Mpa
Compressed air input size 6 mm one touch fitting
Cooling water in/out 1/2" lok fitting (ø16)
cooling water flow Air temp 10liter/min
cooling water pressure 0.1~0.2Mpa
Pump exhaust NW40
Rotary pump capacity 550liter/min
Dry pump exhaust Power thermal 2channel
Dry pump capacity E-beam 4cc 4channel

 

Share this product

Please type your full name.
Invalid Input
Invalid Input
Invalid Input
Invalid email address.
Invalid Input
Invalid Input
Invalid Input
Invalid Input

Register for new product information:    

Premier Solutions (PS) Pte Ltd Singapore

Please publish modules in offcanvas position.