E-beam Evaporator

Features

• Compact, space-saving design
• Rate & thickness control
• Source & substrate shutters
• Multi-source organic evaporation
• Ergonomic to operate, easy to clean
• Compatible with most standard deposition sources
• Configured for your application

Specifications

• Chamber Unit

  • Material : Stainness304 / Aluminum
  • Chamber size : 450x450x600
  • Front Open Door with Window(shutter)
  • ¼”VCR vent port
  • Pumping port/gauge/spare port

  Pumping Unit(Gauge)

  • Osaka turbo pump 1100l/s ISO200
  • inlet flange
  • 600l/m Rotary pump
  • Ion gauge/convection gauge
  • ATM sensor Option : Load-lock unit/Cryo pump
  Substrate Unit

  • Material : Inconel600(High temp)
  • Water cooling stage : OFHC
  • Max Sample size : 6inch
  • Option : Up/down / Heating Max temp 400C/Rotation by motor/Bias for Cleaning

  Control Unit

  • System Manual operation
  • Option : Semi-auto Operation system· 15inch Touch panel control· System reciepe· Interlock(Water/Pneumatic air)· Data loading
  E-beam evaporator Unit

  • E-beam Power supply 6kW with Sweep controller / Remote control unit
  • E-Gun Boat(1~6 multi pocket capacity : 4~7cc)
  • W, Mo source evaporation boat install
  • Max current 300A( Electrical rod - cooling)
  • Pneumatic shutter for source

  Consumable Parts

  • W-boat
  • thickness sensor
  • Vacuum sensor
  • Oil in Rotary Oil Pump
  • O-ring
  • Window
  • Heating module
  • Crucible

Facility Requirements