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Elastomer Seals (2179A Controller)

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Description

 

An integral shut-off valve is available with analog and digital communication (ADC) interfaces in the Lesker MKS 2179A.

The Lesker MKS Instruments 2179A mass flow controllers are designed to control gas flows in a wide variety of applications and available with full-scale flow ranges from 10 sccm up to 20 slm of nitrogen.

The normally closed, pneumatic shut-off valve provides positive shut-off to 10-9 scc/sec. Both analog and digital (converted from analog signal) versions feature the industry-standard 3" footprint and various gas connection fittings. It can replace existing mass flow controllers or meters in existing gas lines without modification to the line. A unique and patented interchangeable bypass enables the instrument to be retrofitted easily for a different flow range.

Features

  • Elastomer-sealed, 316L stainless steel construction
  • 1% F.S. accuracy and 1% of reading for most flow ranges
  • Integral pneumatic diaphragm shut-off valve (70–100 psi needed to actuate)
  • Repeatable flow control to as low as 0.2 sccm
  • MTBF rating for electronics over 100 years ensures reliability

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