F30 System

Filmetrics F30 - The Most Powerful Tool Available for Monitoring Thin-Film Deposition

Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the Filmetrics F30 spectral reflectance system.

Example Layers

MBE and MOCVD: Smooth and translucent, or lightly absorbing films, may be measured.  This includes virtually any semiconducting material, from AIGaN to GaInAsP.

Benefits   

Dramatically Improves Productivity   

Low Cost — Can pay for itself in months   

Accurate — Measure to better than ±1%   

Fast—Measurements in seconds   

Non-Invasive —    Totally outside of deposition chamber   

Easy To Use —    Intuitive Windows™ software   

Turn-Key System Sets Up In Minutes

Common Optional Accessories   

Laptop computer pre-loaded with FILMeasure software   

Lens Assemblies

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