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Automated Film Thickness Mapping
Thin-film thickness on samples up to 200mm by 200mm is easily mapped with the Filmetrics F54-XY-200 advanced spectral reflectance system. The motorized X-Y stage moves automatically to specified measurement locations, facilitating thickness measurements as quickly as two points per second.

Choose one of the dozens of predefined polar, rectangular, or linear map patterns, or create your own with no limit on the number of measurement points.

The table-top instrument connects to the USB port of your Windows® computer, can be set up in minutes and can be used by anyone with basic computer skills.

The different models are distinguished primarily by thickness and wavelength range. Generally, shorter wavelengths (e.g. F54-XY-200-UV) are required for measurement of thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.


Model Specifications

Model Thickness Range* Wavelength Range
F54-XY-200 20nm - 45µm 380-1050nm
F54-XY-200-UV 4nm - 35µm 190-1100nm
F54-XY-200-NIR 100nm - 115µm 950-1700nm
F54-XY-200-EXR 20nm - 115µm 380-1700nm
F54-XY-200-UVX 4nm - 115µm 190-1700nm
*Material and objective dependent

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