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Filmetrics Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments
The Filmetrics F60-c family maps film thickness and index just like Filmetrics F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and cassette-to-cassette robotic wafer handling.
The different Filmetrics F60-c instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths (e.g. F60-c-UV) are required to measure thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films
Each Filmetrics F60-C model includes everything listed below. Note that a sample chuck must be ordered separately:
· Integrated Stage/Spectrometer/Light Source Unit (chuck not included)
· 4", 6" and 200mm Reference Wafers
· TS-Si02-4-7200 Thickness standard
· Vacuum Pump
· Spare TH-1 lamp
· Tweezers
In addition, each Filmetrics F60-c includes these Filmetrics advantages:
· Library with over 130 materials included with every system
· Hardware upgrade program
Common Optional Accessories
· NIST-traceable thickness standard
· F60 Chucks - 200mm, and 300mm
Premier Solutions Pte Ltd / Filmetrics F60c System thin film measurement / thickness measurement