F60-t System

Filmetrics Automated Thickess Mapping for Production Environments            

The Filmetrics F60-t family maps film thickness and index just like Filmetrics F50 products, but it also includes a number of features intended specifically for production environments.  These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and the option to upgrade to fully robotic wafer handling.

The different Filmetrics F60-t instruments are distinguished primarily by wavelength range.  Generally shorter wavelengths (e.g. F60-t-UV) are required for thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.  Production-ready tabletop mapping system includes on-board reference, notch finding, interlocked cover, and more.

Each Filmetrics F60-t model includes everything listed below.  Note that a sample chuck must be ordered separately:

• Integrated Stage/Spectrometer/Light Source Unit (chuck not included) 

• Industrial computer with pre-installed FILMeasure 5.0 software 

• 4”, 6” and 200mm Reference Wafers 

• TS-Si02-4-7200 Thickness standard 

• Vacuum Pump 

• Hardcopy of Operator’s Manual 

• Connecting cables 

• FILMeasure standalone software (for remote data analysis) 

• Spare lamp 

• Tweezers

Common Optional Accessories

• F60 Chucks - 200mm, 300mm 

• NIST - traceable thickness standard

In addition, each Filmetrics F60-t includes these Filmetrics advantages:

• Library with over 130 materials 

• Free software updates

Premier Solutions Pte Ltd / Filmetrics F60-t System thin film measurement / thickness measurement