Phone(+65) 6284 3818 | sales@premier-sols.com | Enquriy |
The gas control system is designed for control of 1-3 types of gases flowing through vacuum sealed MTI tube furnaces in lower cost. The gas control system is installed in heavy duty mobile cart where tube furnace can be placed on the top. The front panels in the system will display flow rate with adjust valves. Combining with MTI tube furnaces, it can be used as CVD system and annealing furnace to study gas environmental influence to materials.
SPECIFICATIONS
Floating Flow-meter | Three Floating Flow-meter with various flow rate range and 4% FS accuracy
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Mechanical Pressure Gauge (mixing tank) | -0.1-0.15 MPa, (0.01 MPa/grit) |
Vacuum needle valves (three) |
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Pipe fitting: 1/4" pipe (nylon or stainless steel) |
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Mobile Cart with four wheel and brake | Dimensions: 600 mm (L) x 600 mm (W) x 650 mm ( H) |
Oxygen Monitoring (optional) | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more: |
Optionals | CVD & PECVD Furnace Click picture below to order bubbler or evaporator for CVD |
Load limit | 400 lbs |
Net weight | 165 lbs |
Shipping dimensions | 41 x 49 x 38 inch |
Shipping weight | 200 lbs |
Warranty | One year limited with lifetime support |
Operation Manual |