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H6-15 Spin Coater

H6-15 Spin Coater

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Description

The Laurell H6-15 spin coater is compact, packed with advanced features, and designed to the be the easiest spin coater to install in your glove box. This 650-series HL coater system will accommodate up to ø300mm wafers and 9" × 9" (229mm × 229mm) substrates, and features a maximum rotational speed of 12,000 RPM (based on a ø100mm silicon wafer).

 

H6-15 Spin Coater Specifications
All HL Series systems include a wireless tablet featuring the exclusive Laurell Touch process control software.

With the use of its accompanying PC software, Spin 3000, it achieves nearly unheard of flexibility both in process definition and use. This wireless controller allows operator interaction in real-time, from anywhere in the lab, during process execution — including pausing time, stopping and continuing on from that point. The system can and will be continually updated easily and quickly in the field with downloadable firmware revisions. (We plan ahead at Laurell!)

Researchers worldwide have developed unique processes which will ONLY run with the level of control sophistication we offer. The HL Series controller can also be used in conjunction with a PC with Spin 3000, Laurell's exclusive process management software. However, this is NOT required to program or run the equipment.

The use of a PC adds the ability to record a process as it's run, operate remotely, program or communicate across a LAN or the Internet. The software, which is supplied at no additional cost, allows the operator to create virtual process simulations even beyond the hardware actually installed spin processor, in effect, letting them try it before they commit to a process. All HL Series systems can be upgraded or re-purposed without return to the factory with simple plug-in modules, either actually or virtually, and can contain a virtually unlimited number of processes and steps.

A Brief Description: The housing for this system is typically made from a solid co-polymer blend exclusive to Laurell Technologies. Unlike pure Natural Polypropylene, this material is able to resist solvents and strong acids and bases. Samples are available for testing and verification upon request. A solid PTFE Hostaflon® TFM-1600 / Teflon® AF housing is available (popular for high temperature chemistry and sub-micron particle studies).

Laurell's unique internal bowl design eliminates splash back, making it unnecessary to install "splash rings." Our large Adjustable Down-Flow Exhaust & Drain separates vapors, which are exhausted upward, from liquids, which are drained downward, and includes an adjustable control valve to fine-tune exhaust flow.

The closed bowl design, coupled with the precision of the process controller, allows most coating materials to dry in a quiescent state, increasing uniformity and minimizing particle contamination. The upper plenum closes inside the base to provide an overlapping seal, and the inside of the lid has a special gutter to channel fluid to the rear of the system to discourage chemicals from accidentally dripping onto the substrate.

A proprietary labyrinth seal protects the motor and control electronics from chemical contamination. This seal provides the process chamber with Nitrogen purge and has been proven to be particle-free on a sub-micron level during field testing. The system's lid is chemically resistant, and is secured using ECTFE-coated 316 stainless steel screws in non-wetted areas throughout the system.

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