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Ion Sources

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Our Ion Source systems include the ion source, power supply, cabling, feedthroughs, flexible internal utilities, swivel/rotating mounting collar, and choice of grids.

Our patented ion sources do not use thermionic tips nor filaments when generating plasma and neutralizing up to 85% of energy. These ion sources are offered in 3, 5, and 10 cm configurations.


  • 3, 5, and 10 cm configurati
  • Filamentless sources
  • Reactive gas compatible
  • Internal or flange mount
  • Collimated or focused grids
  • UHV compatible

Applications include:

  • Ion-assisted deposition
  • Plasma cleaning
  • Oxiding
  • Nitriding
  • Surface modification



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Premier Solutions (PS) Pte Ltd Singapore

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