Ion Sources

Our Ion Source systems include the ion source, power supply, cabling, feedthroughs, flexible internal utilities, swivel/rotating mounting collar, and choice of grids.

Our patented ion sources do not use thermionic tips nor filaments when generating plasma and neutralizing up to 85% of energy. These ion sources are offered in 3, 5, and 10 cm configurations.

Features:

• 3, 5, and 10 cm configurati
• Filamentless sources
• Reactive gas compatible
• Internal or flange mount
• Collimated or focused grids
• UHV compatible

Applications include:

• Ion-assisted deposition
• Plasma cleaning
• Oxiding
• Nitriding
• Surface modification