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Metal Seals (1479A Controller)

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Metal-sealed mass flow controller, ideal for high-purity semiconductor applications involving corrosive gases, is available with analog and digital communication (ADC) interfaces.

The Lesker MKS Instruments 1479A mass flow controllers are designed to control gas flows in high-purity applications. They are available with full-scale flow ranges from 10 sccm up to 20 slm of nitrogen.

Both the Lesker 1479A analog and digital (converted from analog signal) versions feature the industry standard 3" footprint and a variety of gas connection fittings. They can often replace existing mass flow controllers or meters in existing gas lines without modification to the line. A unique and patented interchangeable bypass enables the instrument to be retrofitted easily for a different flow range.


  • Metal-sealed, electropolished 316L stainless steel construction
  • 1% F.S. accuracy and 1% of reading for most flow ranges
  • Repeatable flow control to as low as 0.2 sccm
  • MTBF rating for electronics over 100 years ensures reliability

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