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XRF (X-ray fluorescence) is the most common method for measuring metal films that are greater than 50 nm thick. To measure metal films thinner than 50 nm spectral reflectance (SR) and transmittance are commonly used. Filmetrics F10-RT can be configured to measure the thickness of metal films from 1 to 50 nm thick. Filmetrics PARTS system can also measure this thickness range, along with the metal’s refractive index and extinction coefficients. Both systems are faster and less expensive than XRF analyzers. Like all Filmetrics systems, all they require is a few seconds and a mouse click!
Premier Solutions Pte Ltd / Filmetrics Applications (Thickness Measurement / Thin Film Measurement ) – Metal Thickness