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MKS 647C Full Rack Multichannel Controller

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Lesker MKS 647C Full Rack Multichannel Controller


A multipurpose, mass flow and pressure programmer, controlling up to 8 gas flow and 1 pressure sources

The MKS 647C is a full-rack, multi-channel controller, providing both pressure and flow control. Up to 8 gas mass flow channels and 1 pressure channel enable independent or ratio-based gas flow control. One pressure and 4 gas flow channels can be displayed simultaneously on the informative LCD readout and are controlled locally from the front panel keypad or remotely using the standard RS232 (ADC) interface. See pages 12-6 to 12-11 for appropriate mass flow controllers and meters.


  • Available in 4- or 8-channel gas flow versions
  • Up to 5 programmable and selectable gas recipes reduce process downtime
  • 3 modes of operation include upstream pressure, downstream pressure, and gas flow control
  • Optional digital PID supports upstream pressure and gas flow ratio control
  • Dual-relay option per channel triggers alarm when flow deviates from set point



Lesker MKS 647C Full Rack Multichannel Controller

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