Phone(+65) 6284 3818 | sales@premier-sols.com | Enquriy |
Filtering mechanical pump oil is essential for vacuum processes producing particles, hydrous acids, or Lewis acids. Forcing the oil through elements that neutralize acids, adsorb moisture, and entrain particles reduces pump repair costs while extending oil life.
Systems excel in applications involving small- and large-scale ion implantation, plasma etching, photo-resist stripping, and LPCVD processes.
How It Works
Oil transfers by a high-pressure pump (115/230V TEFC electric motor wired standard for 115 VAC) through parallel filter elements, each housed in a patented container.
The fluid forces through the labyrinth of sub-micron-size pores in the filtering medium, where particles are physically trapped-and water, acids, and ammonia are adsorbed.
No. of Elements | 3 |
Motor (hp) | 1/12 |
Flow (L/min.) | 1.9 |
Oil Capacity (L) | 3 |
Pressure Gauge | Yes |
Compatible Fluids | Hydrocarbon, Inert |
Elements Included | 3 active Alumnia filters |