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Motorguard Oil Filtration Unit (Multiple Canisters)

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Description

Filtering mechanical pump oil is essential for vacuum processes producing particles, hydrous acids, or Lewis acids. Forcing the oil through elements that neutralize acids, adsorb moisture, and entrain particles reduces pump repair costs while extending oil life.

Motorguard Filter Unit

Systems excel in applications involving small- and large-scale ion implantation, plasma etching, photo-resist stripping, and LPCVD processes.

How It Works

Oil transfers by a high-pressure pump (115/230V TEFC electric motor wired standard for 115 VAC) through parallel filter elements, each housed in a patented container.

The fluid forces through the labyrinth of sub-micron-size pores in the filtering medium, where particles are physically trapped-and water, acids, and ammonia are adsorbed.

  • Units attach directly to a mechanical pump with two flexible hoses
  • Filter elements are tightly compressed, multi-layer rolls of cellulose (paper) activated alumina, or hydrophilic fabric media
  • Maintain oil at a pH of 7 while removing abrasive particles down to 0.1 micron diameter
  • Each unit ships with two 3/8" (I.D.) x 5' flexible hoses and instruction manual suggesting interconnection to different mechanical pump models

Specifications Table

No. of Elements 3
Motor (hp) 1/12
Flow (L/min.) 1.9
Oil Capacity (L) 3
Pressure Gauge Yes
Compatible Fluids Hydrocarbon, Inert
Elements Included 3 active Alumnia filters

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