Kurt J. Lesker OCTOS - Robotic Cluster Tool Distribution Center

Applications

• The Kurt J. Lesker QDV 450 facilitates multichamber in-vacuum substrate transfer–ideal for R&D cluster tool environments.
• The Kurt J. Lesker QDV 450 is fully automated with recipe control and sensing features for acurate and continuous transfer.

Features

• All aluminum vessel construction
• Stand alone framework
• Turbomolecular pumping
• Accommodates up to 6" (150 mm) diameter substrates
• Precision vacuum robot with 3-axis movement
• MESC-SEMI rectangular ports
• Fully automated with recipe control

Options:

• External dedicated load lock chamber
• External single or multi wafer storage

Lesker QDV 450R - Robotic Substrate Distribution Vessel