OF1000 Filter Unit (Single Canisters) Accessories

Remove acids and particulates from mechanical pump fluids while pump operates.

Features

• Easily installed and replaced element/canister assembly has a recessed lid to prevent oil spillage
• Unit features fluid capacity of 3.75 qt.
• Flexible PTFE hoses guard against oil leaks caused by electrical discharges burning pinholes in the hose
• Hoses terminate in dripless quick disconnects
• Three series of units are available

Standard Series: Works in silicon production processes including LPCVD, LP epitaxy, and numerous plasma processes.

PFPE Series: Similar to the Standard Series but is prepared for filtering Fomblin^® oils.

Chemical Series: Has a PTFE coating on the filter's interior housing, making it an excellent unit for filtering oils used in BCl3 and fluorocarbon etch process systems.

NOTE:

• Filter elements sold separately. See the Replacement Filter Elements chart for selections.
• Dual canister versions, for filtration needs requiring multimedia filter elements, are available upon request. Contact us for pricing and availability.
• PTFE/Carbon Black with Stainless Steel Braid