Pinnacle Plus+ Series

AE Pinnacle Plus+ Series

Advanced Energy’s Lesker Pinnacle Plus+ power supply provides all of the advantages of a pulsed-DC solution for your reactive processes— in a one-box package that delivers additional benefits in the form of ease of use, cost savings, and superior flexibility. Combining standard DC technology and process-proven pulsed-DC technology patented by AE in the 1990s, the Pinnacle Plus+ power supply provides higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions. The Lesker Pinnacle Plus+ product line consists of single-output 5kW and 10kW models, as well as a dual-output 5kW model.

Features:

• Compact package
• Adjustable frequency range from 5 kHz to 350 kHz
• Variable duty cycle up to 45%
• Wide voltage and impedance ranges (single-tap)
• Superior arc control
• Dual output for multi-chamber use
• Reactive sputtering closed-loop control

Pinnacle Plus+ Series