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(+65) 6284 3818

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sales@premier-sols.com

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  7. Planar Series Load Lock Vessels

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Load Locks

Planar Series Load Lock Vessels

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Description

 

Ideally suited for single substrate transfer.

Features

  • Rectangular, low-profile design
  • Can transfer wafers up to 150mm

 

Lesker Planar Series Load Lock Vessels

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