Protection Valve System

New from Kurt J. Lesker Company-our patented Protection Vacuum Gate Valve's fast action (<0.3 secs to close) protects products that are "in-process" in the event of a vacuum pump failure. This bellows sealed, pneumatic actuated, SS valve system monitors up to four pumps with local or remote control and LCD status display.

The internal mechanism has a low particle generation design and is shielded, in open and closed positions, against particulate accumulation-leading to long life under adverse process conditions.

Applications

For vacuum pump or chamber isolation in demanding processes:

• Plasma etching, cleaning, and desmearing
• All CVD processes (including MO, PE, HDP, LP, and AP)
• Sputter deposition and e-beam/thermal evaporation
• Nanotechnology processes with high particulate levels
• Thin film photovoltaic panels

Features

• Significantly reduces down time by protecting your system from backstreaming process in the event of vacuum pump failure
• Ideally suited for high particulate generating applications
• Fast pneumatic actuation-close in <0.3 seconds
• Long cycle life under adverse process conditions
• Low shock/motion during open/close cycling
• Local/remote control with status LCD display
• 1, 2, 3, or 4 channel control options