Phone(+65) 6284 3818 | sales@premier-sols.com | Enquriy |
Filmetrics R-Series sheet resistance mapping tools marry the technology developed and perfected by KLA for over 45 years with the benchtop instrument technology developed over the last 20 years by the Filmetrics team. The R50-4PP contact four-point probe is recommended for thin metal and ion implant layers, and the R50-EC non-contact eddy current probe is recommended for thicker metal layers and soft or flexible surfaces, including:
Model | Sensor Type | Measurement Range | Maximum Map Diameter | XY Stage Range | Maximum Sample Width | Maximum Sample Height |
---|---|---|---|---|---|---|
R50-4PP | Contact 4PP | 1mΩ/sq - 200MΩ/sq | 100mm | 100mm x 100mm | 265mm | 100mm |
R50-EC | Non-contact eddy current | 1mΩ/sq - 10Ω/sq | 100mm | 100mm x 100mm | 265mm | 100mm |
R50-200-4PP | Contact 4PP | 1mΩ/sq - 200MΩ/sq | 200mm | 200mm x 200mm | 365mm | 100mm |
R50-200-EC | Non-contact eddy current | 1mΩ/sq - 10Ω/sq | 200mm | 200mm x 200mm | 365mm | 100mm |