RDC 48 - 48" Radial Distribution Center

Applications

• The Kurt J. Lesker RDC 48 facilitates multi-chamber in-vacuum substrate transfer ideal for cluster tool environments.
• UHV compatible, the Kurt J. Lesker RDC 48 is suited for university, industrial, and government R&D labs

Features

• 48" diameter stainless steel transfer vessel
• Adjustable height aluminium extruded framework
• Turbo-molecular pumping
• Accommodates up to 8" (200mm) diameter substrates
• Linear rack and pinion transporter, controlled via rotary drive
• Up to (8) flanged transfer ports

Options:

• Special sizes and port orientations available
• MESC rectangular ports
• Manually operated DC motorization of rack and pinion
• Ion pumping

Lesker RDC 48 - 48" Radial Distribution Center