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Reactive Ion Etcher
Description
Features
- CCP / PECVD
- Anisotropic Etching Characteristics
- Fine machining performance
- Accelerated by the DC BIAS
- W / F and AWLL surface DAMAGE
- Metal contamination, P / T, E / R Low
- Temperature cooling
Specifications
- Chamber Unit
Material : Stainness304- Chamber size : (Optional)
- Top shower head(Switched bias)
- ¼”VCR vent port
- Window port (I.D40mm)
- MKS NW40 Auto pressure control valve with
- Controller
- 600l/m Rotary pump
- Capacitance gauge(10torr NW16)
- ATM sensor
- Option : High Vacuum unit Turbo pump(magnet type/Full range
Chamber Unit- Material : Hard Anodizing Al with Ceramic insulator
- 600watt RF power with Matching box
- Water cooling
- Max Sample size : 6inch
- Option : Up/down / Heating - 400℃
- MKS Ar/O2/SF6 Mass flow controller
- On/off Diaphram valve unit
- Option : 2channel addition Gas leak sensor
Gas Showerhead Unit- Material : Hard Anodizing Aluminum with insulator
- ¼”VCR Gas input port
- 15inch Touch pa.nel control
- System reciepe
- Interlock (Water/Pneumatic air)
- Data loading
Consumable Parts
Vacuum sensor- Oil in Rotary Oil Pump
- O-ring
- Window
- Pump
Facility Requirements
| Electrical power | 220VAC 1ph 30A |
|---|---|
| Compressed air | 0.5~0.6Mpa |
| Compressed air input size | 6 mm one touch fitting |
| Cooling water in/out | 3/8" lok fitting (ø10) |
| cooling water flow | Air temp 5~7liter/min |
| cooling water pressure | 0.1~0.2Mpa |
| Safety exhaust size | |
| Gas input pressure | 40psi |
| Gas port | 4ch standard (Option 2ch Expansion) |
| Gas port Size | 1/4"VCR fitting |
| Pump exhaust | NW40 |
| Rotary pump capacity | 550liter/min(formblin) |
| Vent | 1/4"lok fitting |
| Dry pump exhaust | RF 600watt |
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