Phone

(+65) 6284 3818

Email

sales@premier-sols.com

Enquriy
Reactive Ion Etcher

Reactive Ion Etcher

0.0/5 rating (0 votes)

Description

Features

  • CCP / PECVD
  • Anisotropic Etching Characteristics
  • Fine machining performance
  • Accelerated by the DC BIAS
  • W / F and AWLL surface DAMAGE
  • Metal contamination, P / T, E / R Low
  • Temperature cooling

Specifications

  • Chamber Unit
    • Material : Stainness304
    • Chamber size : (Optional)
    • Top shower head(Switched bias)
    • ¼”VCR vent port
    • Window port (I.D40mm)
    Pumping Unit(Gauge)
    • MKS NW40 Auto pressure control valve with
    • Controller
    • 600l/m Rotary pump
    • Capacitance gauge(10torr NW16)
    • ATM sensor
    • Option : High Vacuum unit Turbo pump(magnet type/Full range
    Chamber Unit
    • Material : Hard Anodizing Al with Ceramic insulator
    • 600watt RF power with Matching box
    • Water cooling
    • Max Sample size : 6inch
    • Option : Up/down / Heating - 400℃
    Pumping Unit(Gauge)
    • MKS Ar/O2/SF6 Mass flow controller
    • On/off Diaphram valve unit
    • Option : 2channel addition Gas leak sensor
    Gas Showerhead Unit
    • Material : Hard Anodizing Aluminum with insulator
    • ¼”VCR Gas input port
    Control Unit
    • 15inch Touch pa.nel control
    • System reciepe
    • Interlock (Water/Pneumatic air)
    • Data loading
    Consumable Parts
    • Vacuum sensor
    • Oil in Rotary Oil Pump
    • O-ring
    • Window
    • Pump

Facility Requirements

Electrical power 220VAC 1ph 30A
Compressed air 0.5~0.6Mpa
Compressed air input size 6 mm one touch fitting
Cooling water in/out 3/8" lok fitting (ø10)
cooling water flow Air temp 5~7liter/min
cooling water pressure 0.1~0.2Mpa
Safety exhaust size  
Gas input pressure 40psi
Gas port 4ch standard (Option 2ch Expansion)
Gas port Size 1/4"VCR fitting
Pump exhaust NW40
Rotary pump capacity 550liter/min(formblin)
Vent 1/4"lok fitting
Dry pump exhaust RF 600watt

Share this product

Please type your full name.
Invalid Input
Invalid Input
Invalid Input
Invalid email address.
Invalid Input
Invalid Input
Invalid Input
Invalid Input

Register for new product information:    

Premier Solutions (PS) Pte Ltd Singapore

Please publish modules in offcanvas position.