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Power Supplies

RF Power Supplies

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Complete packages ready to provide reliable plasma generation and RF biasing to meet your process requirements.


  • CE marked compliance
  • Microprocessor-controlled, solid-state construction
  • Master and slave mode operations
  • Automatic and manual matching networks available
  • Electronics constructed to minimize VSWR conditions, extending unit life
  • Programmable high-speed pulsing
  • Complete power generator packages — includes everything you need, eliminating guesswork

Control modes to regulate power output:

  • DC Voltage
  • RF Voltage
  • Forward Power Leveling
  • Load Power Leveling

NOTE: 1kW - 10kW power supply packages come with no output connector. Additional charges may be applied for certain output options


RF Power Supplies

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