RF Power Supplies

Complete packages ready to provide reliable plasma generation and RF biasing to meet your process requirements.

Features:

• CE marked compliance
• Microprocessor-controlled, solid-state construction
• Master and slave mode operations
• Automatic and manual matching networks available
• Electronics constructed to minimize VSWR conditions, extending unit life
• Programmable high-speed pulsing
• Complete power generator packages — includes everything you need, eliminating guesswork

Control modes to regulate power output:

• DC Voltage
• RF Voltage
• Forward Power Leveling
• Load Power Leveling

NOTE: 1kW - 10kW power supply packages come with no output connector. Additional charges may be applied for certain output options

RF Power Supplies