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Roll to Roll CVD System for Continuous 2D Film Growth & Wire Annealing- OTF-1200X-III-RR

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Three Heating Zone Tube Furnace

  • Input power: 220VAC, 50/60Hz, single phase at Max. 5KW
  • Heating element: Fe-Cr-Al Alloy doped by Mo
  • 1200oC Max. working temperature for < 60 minutes
  • 1100oC Max. working temperature for continuous heating
  • Recommended heating rate: ≤ 10ºC/min
  • High purity quartz tube: φ100 x 1400mm
  • Total three heating zone length: 600mm (150mm + 300mm + 150mm)
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection
  • Temperature accuracy: ±1ºC
R2R Vacuum Chambers      
  • Two vacuum chambers are located in two ends of the furnace and connected with the quartz tube
  • The reeling rollers for a substrate in and out are located inside the vacuum chamber 
  • Reeling speed for the substrate is adjustable from 1- 400mm/min
  • One roll of copper foil with 80 mm width and 0.025 mm thick (~2 kg) is included for customer practice
  • The max vacuum pressure for the chamber: 5 x 10^-2 torr
Three Channel Gas Delivery Station (Optional)
  • Power: 220VAC, 50Hz, single-phase at Max. 23KW
  • Gas mixing tank: φ80 x 120mm
  • Working Temperature: 5~45ºC
  • Max. Pressure: 3 x 106 Pa
  • Accuracy: ±1.5% F.S.
  • Liner: ±(0.5-1.5)% F.S.
  • Duplicate accuracy: ±0.2%F.S.
  • Controlling Range:
    • Controller 1: 0~50 SCCM (Methane calibration)
    • Controller 2: 1~200 SCCM (H2 gas calibration)
    • Controller 3: 1~200 SCCM (Ar gas calibration)
  • Click Pic on the left for detailed specification
  • Warning: H2 and Methane must be installed nearby the furnace to alarm gas leaking
Vacuum Pump and Valve
  • Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 Torr.
  • KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with the ball valve
  • Digital vacuum pressure gauge and display are installed with the furnace (Pic. 1)
  • The oil-less pump (Pic. 2) and gas mixing & delivery system (Pic. 3) are available and PID pressure controlled vacuum system is available upon request at an extra cost
        Pic. 1          Pic. 2Pic. 3
Anti-corrosive Pressure Gauge
  • 3.8 x 10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail specs
Temperature Controller
  • Three temperature controllers with 30 programmable segments with  +/- 1ºC temperature accuracy
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection
  • Over-temperature protection and alarm allow for operation without attendant(s)
  • RS485 Communications Port with PC operation software
  • You may upgrade the temperature controller to the Eurotherm Controller with 0.1ºC accuracy with software
Control Panel
  • 7" touch screen control panel which will control temperature, gas flow rate, plasma power 
  • PC control software is available upon request for remote operation by Laptop computer (Must buy a laptop with pre-installed software)
  • 2400mm L x 600mm W x 1400mm H
One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
  • CE Certified
  • NRTL (UL61010) or CSA certification is available at an extra cost
Operation Instruction
Application Note
  • The quartz tube is designed for use under vacuum and low pressure < 0.2 bars / 3 psi  ( Relative ).
  • The furnace can be modified into a roll to roll hydrogen wire annealing furnace via adding H2 burning and leaking detecting and protection system, as below 
Total Shipping Weight 400 kg (900 lbs)

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