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Roll to Roll PE-CVD System for Continuous Graphene or 2D Film Growth - OTF-1200X-II-PE-RR

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OTF-1200X-II-PE-RR is a lab-scale Roll to Roll  PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 80mm O.D  two heating zone split tube furnace at 1200oC Max., 3 channel MFC gas delivery station, and high-quality mechanical vacuum pump, and two vacuum chambers with substrate reeling in and out, as well as touch screen control panel.  The R2R system is designed for exploring flexibility to grow graphene or other two-dimension films continuously for the industry.


Two Heating Zone Tube Furnace
  • Two heating zone with 440 mm length single heating zone and 250 mm length constant temperate zone
  • 1200oC Max. working temperature for < 60 minutes
  • 1100oC Max for continuous heating
  • 30 segments programmable precision digital temperature controller with +/1ºC accuracy 
  • (Eurotherm 3000 Temperature controller is optional for  +/- 0.1ºC accuracy)
  • High purity quartz tube: 80mm OD x 72mm ID x 1400 mm Length 2.83"ID x 55'' Length
    • 100 mm OD x 94mm ID tube is available as an option
  • Input power: 208 - 240V AC input, a single phase at max. 3KW
  • Three heating zone furnace is available as optional
Plasma RF Power Supply
  • Output Power: 5 - 300W adjustable with ± 1% stability
  • RF frequency: 13.56 MHz ±0.005% stability
  • Matching: Automatic
  • RF Output Port: 50 Ω, N-type, female
  • Noise: <50 dB. 
  • Cooling: Air cooling
  • Power: 208-240VAC, 50/60Hz, single phase
R2R Vacuum Chambers
  • Two vacuum chambers are located in two ends of the furnace and connected with the quartz tube
  • The reeling rollers for a substrate in and out are located inside the vacuum chamber 
  • Reeling speed for the substrate is adjustable from 1- 400mm/min
  • Max. movable substrate: 65 mm Width  for 80mm OD tube
  • One roll of copper foil with 65 mm width and 0.025 mm thick (~5 kg) is included for customer practice
  • 100mm OD tube is available upon request, which can feeding substrate with max. width 80 mm
  • Roll to Roll mechanism with speed controller and sealed flange without furnace may available upon request.
Three Channel Gas Delivery Station
  • Working Temp.: 5~45 ºC
  • Max. Pressure: 3x106 Pa
  • Accuracy: ±1.5% FS
  • Liner: ±(0.5-1.5)%F.S.
  • Duplicate accuracy: ±0.2%F.S.
  • Controlling Range:
    • Controller 1: 0~100 SCCM (Ar gas calibration)
    • Controller 2: 1~199 SCCM (H2 gas calibration)
    • Controller 3: 1~499 SCCM (Methane calibration)
  • Click Pic left for detail specification
  • Warning: H2 and Methane must be installed nearby the furnace to alarm gas leaking.
 Vacuum Pump and valve
  • Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 Torr.
  • KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with the ball valve
  • Digital vacuum pressure gauge and display are installed with the furnace (Pic. 1)
  • The oil-less pump (Pic. 2) and gas mixing & delivery system (Pic. 3) are  available and PID pressure controlled vacuum system is available upon request at an extra cost
   Pic. 1          Pic. 2Pic. 3
Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail spec
Temperature Controller
  • Two temperature controllers with 30 programmable segments with   +/- 1 ºC temperature accuracy
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection
  • Over-temperature protection and alarm allow for operation without attendant(s)
  • RS485 Communications Port with PC operation software
  • You may upgrade the temperature controller to the Eurotherm Controller with 0.1 ºC accuracy with software
Control Panel
  • 7" touch screen control panel which will control temperature, gas flow rate, plasma power 
  • PC control software is available upon request for remote operation by Laptop computer (Must buy a laptop with pre-installed software)

  • We may upgrade the furnace to 5" Tube, and grow 4" width film
  • The larger diameter tube up to 8" OD for the roll to roll CVD system is available upon request
Overall dimensions
2400 L x 600 W x 1250 H mm
One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
  • CE Certified
  • NRTL (UL61010) or CSA certification is available at extra cost.
Operation Instruction

Click here to learn the installation of a gas regulator
  • The quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • MTI reserves right to modify PECVD design at  any time without notice but promise that quality will meet the specifications above
Total Shipping Weight 500 kg (1100 lbs) including crate

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