Phone

(+65) 6284 3818

Email

sales@premier-sols.com

Enquriy

Rotation Powder ALD 4" Tube Furnace System Upto 1200C - ALD-1200X-R-4

0.0/5 rating (0 votes)

Description

ALD-1200X-R-4 is a 4" rotation tube furnace combining with two-channel ALD valves and one channel liquid-vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery to make the surface coating on powder by both ALD and CVD.    The smart design makes ALD  more cost-effective and affordable for every research group.

 

SPECIFICATIONS:

Control Panel
  • All parameters of Vapor, ALD, and  Gas flow are integrated into one mobile cart and controlled by PLC via a 6" touch screen panel: 
    • Two-Channel ALD valve
    • For channels MFC gas delivery 
  • Please click the picture below to see control interface
  
ALD valve
  • Two ALD valves with pulse controller  (min 10 ms duration )
  • Capable of heating with thermal actuators
Liquid-Vapor Generator
  • Automatic liquid-vapor generator is included and connects to  ALD valve
Rotation furnace
  • Max 1100ºC for continuous heating
  • Two programmable precision digital temperature controllers with 30 segments.
  • Input power: 208 – 240V AC input, a single phase at max. 4KW
  • Rotation speed:  0 - 10 RPM
  • 4" quartz Tube as the drawing below
            Four Mixing Blades                Dimension
Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail spec.
Vacuum Pump 
( optional)
  • 10E-2 Torr vacuum can be achieved inside the processing tube
  • The vacuum pump is not included, suggest you order a dry pump for CVD process by click picture below
  •       
More Bubbler
Optional


                    
  • Click the picture below to order bubbler or evaporator for CVD, and  below right ( 1-2) for Constant pressure control module( Pic.right 2)
  • Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra cost
                      
Warranty
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance
    
  • CE Certified
  • NRTL  or CSA certification is available upon requesat extra cost.
Application
Operation Instructions
     

Share this product

Enquiry Form

Please type your full name.
Invalid email address.
Invalid Input
Invalid Input

Register for new product information:    

Please publish modules in offcanvas position.