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Rotation Powder ALD 4" Tube Furnace System Upto 1200C - ALD-1200X-R-4

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ALD-1200X-R-4 is a 4" rotation tube furnace combining with two-channel ALD valves and one channel liquid-vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery to make the surface coating on powder by both ALD and CVD.    The smart design makes ALD  more cost-effective and affordable for every research group.



Control Panel
  • All parameters of Vapor, ALD, and  Gas flow are integrated into one mobile cart and controlled by PLC via a 6" touch screen panel: 
    • Two-Channel ALD valve
    • For channels MFC gas delivery 
  • Please click the picture below to see control interface
ALD valve
  • Two ALD valves with pulse controller  (min 10 ms duration )
  • Capable of heating with thermal actuators
Liquid-Vapor Generator
  • Automatic liquid-vapor generator is included and connects to  ALD valve
Rotation furnace
  • Max 1100ºC for continuous heating
  • Two programmable precision digital temperature controllers with 30 segments.
  • Input power: 208 – 240V AC input, a single phase at max. 4KW
  • Rotation speed:  0 - 10 RPM
  • 4" quartz Tube as the drawing below
            Four Mixing Blades                Dimension
Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail spec.
Vacuum Pump 
( optional)
  • 10E-2 Torr vacuum can be achieved inside the processing tube
  • The vacuum pump is not included, suggest you order a dry pump for CVD process by click picture below
More Bubbler

  • Click the picture below to order bubbler or evaporator for CVD, and  below right ( 1-2) for Constant pressure control module( Pic.right 2)
  • Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra cost
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
  • CE Certified
  • NRTL  or CSA certification is available upon requesat extra cost.
Operation Instructions

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