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Small Batch (12 pcs 6" Wafer) PECVD System ( CCP type ) for Pilot Test - PECVD-8-16

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Description

PECVD-8-16 is a CCP type PECVD system for a small batch of 12 pcs 6" wafer.  The system consists of an 8"ID quartz tube furnace up to 1100°C, a batch type graphite boat for 12 wafers, 1000W plasma generator, and a 4-channel programmable gas delivery system. It is an excellent tool for a pilot test of thin-film research of solar cell and 2D materials.
 
SPECIFICATIONS
Furnace structure
  • High purity alumina fibrous insulation for max energy saving
  • Three heating zones to achieve 600 mm constant temperature zone up to 1100ºC.
  • 8.5" OD 5 8" ID quartz tube with vacuum-sealed flanges 
  • One sliding rail driven by a DC motor facilitates loading of the graphite boat and samples
  • High purity graphite boat can carry up to 12 circular or rectangular 6" wafers
  • 1000W RF (13.5MHz) power supply is included for plasma generation.
  • Four-channel gas mixing and delivery system is included for deposition of precursors
  •  A vacuum pump (oil or dry type) is available upon request.
Power
  • 208-240 VAC, single phase,  50/60 Hz
  • 9 kW
  • Power cord is included without a plug. MTI may help customer add a power plug at an extra cost. 
Quartz tube & flanges
  • 8.5" O.D x 8.2" I.D x 51" Length
  • One quartz tube is included, and the spare tube is available as an option ( click picture left to order )
  • SS304 flanges are included with the KF40 vacuum port & valve and  gas inlet & outlet are included
  • Built-in dual sliding rails and DC motor drives the flange and sample boat in and out
Graphite Boat
  • Graphite boat made of high purity graphite ( Japan) with RF electrodes
  • 12 slots ( 4x3 ) slot to carry 6" x6" x0.5 mm  or 6" diameter wafers
  • Customized graphite boat ( 4x4 or 5 x4 ) is available upon request at the extra cost
Furnace
  • Heating element:  NiCrAl Resistance Wire
  • Heating Zone:  Three heating zone ( 300 mm + 300 mm + 300mm )
  • Constant temperature zone:            600 mm within +/- 2ºC ( If 3 zone at the same temp.)
  • Working temperature:                      400 -1100°C
  • Max. heating/cooling rate:               10°C/min     
  • Click the picture left to see details of furnace specs.
Temperature controllers
  • Three Eurotherm 3000 temperature controllers with 24 segments programmable
  • Three K type thermal couples are installed.
  • Temperature accuracy: +/- 0.1°C
  • Software and PC interface module is  included
RF Plasma Generator
  • Output Power:            20  -1000W adjustable with ± 1% stability
  • RF frequency:            13.56 MHz ±0.005% stability
  • Matching:                   Automatic with variable air capacitor
  • Cooling:                     Air cooling
  • Noise:                        <50 dB
  • Power:                       110 - 240VAC, 50/60Hz
Gas Delivery System
  • Four MFCs are built in a movable cart with accuracy: ±1.5%FS and repeatability: ±0.2%FS
    • Controller 1: 0~100 SCCM
    • Controller 2: 1~199 SCCM
    • Controller 3: 1~199 SCCM
    • Controller 4: 1~499 SCCM
  • Touch screen panel to gas delivery parameters
  •  RS485 port is installed for remote control by a PC
  • Customized software is available to match receipts upon request at an extra cost.
  • Range of each MFCs are interchangeable at an extra cost. 
Vacuum Pump & Gauge
  • An anti-corrosion vacuum gauge is included up to 10-5 torr
  • A vacuum pump is required, but not included. Please click the link pics to order
  •  Vacuum gauge  Oil pump     Dry scroll pump
Product dimension
  Click the picture to see the detail.
Net weight~ 500 Kg
Shipping dimension70" x 70" x 65"
Shipping weight~600 Kg
WarrantyOne year limited warranty for electronic and mechanical part, excluding heating element and ceramic tube damaged by user
Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request
Schematic Diagram and 
Demo Video
  •        

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