Small Batch (12 pcs 6" Wafer) PECVD System ( CCP type ) for Pilot Test - PECVD-8-16

PECVD-8-16 is a CCP type PECVD system for a small batch of 12 pcs 6" wafer.  The system consists of an 8"ID quartz tube furnace up to 1100°C, a batch type graphite boat for 12 wafers, 1000W plasma generator, and a 4-channel programmable gas delivery system. It is an excellent tool for a pilot test of thin-film research of solar cell and 2D materials.

 

SPECIFICATIONS

Furnace structure	High purity alumina fibrous insulation for max energy saving Three heating zones to achieve 600 mm constant temperature zone up to 1100ºC. 8.5" OD 5 8" ID quartz tube with vacuum-sealed flanges  One sliding rail driven by a DC motor facilitates loading of the graphite boat and samples High purity graphite boat can carry up to 12 circular or rectangular 6" wafers 1000W RF (13.5MHz) power supply is included for plasma generation. Four-channel gas mixing and delivery system is included for deposition of precursors  A vacuum pump (oil or dry type) is available upon request.
Power	208-240 VAC, single phase,  50/60 Hz 9 kW Power cord is included without a plug. MTI may help customer add a power plug at an extra cost.
Quartz tube & flanges	8.5" O.D x 8.2" I.D x 51" Length One quartz tube is included, and the spare tube is available as an option ( click picture left to order ) SS304 flanges are included with the KF40 vacuum port & valve and  gas inlet & outlet are included Built-in dual sliding rails and DC motor drives the flange and sample boat in and out
Graphite Boat	Graphite boat made of high purity graphite ( Japan) with RF electrodes 12 slots （ 4x3 ) slot to carry 6" x6" x0.5 mm  or 6" diameter wafers Customized graphite boat ( 4x4 or 5 x4 ) is available upon request at the extra cost
Furnace	Heating element:  NiCrAl Resistance Wire Heating Zone:  Three heating zone ( 300 mm + 300 mm + 300mm ) Constant temperature zone:            600 mm within +/- 2ºC ( If 3 zone at the same temp.) Working temperature:                      400 -1100°C Max. heating/cooling rate:               10°C/min      Click the picture left to see details of furnace specs.
Temperature controllers	Three Eurotherm 3000 temperature controllers with 24 segments programmable Three K type thermal couples are installed. Temperature accuracy: +/- 0.1°C Software and PC interface module is  included
RF Plasma Generator	Output Power:            20  -1000W adjustable with ± 1% stability RF frequency:            13.56 MHz ±0.005% stability Matching:                   Automatic with variable air capacitor Cooling:                     Air cooling Noise:                        <50 dB Power:                       110 - 240VAC, 50/60Hz
Gas Delivery System	Four MFCs are built in a movable cart with accuracy: ±1.5%FS and repeatability: ±0.2%FS Controller 1: 0~100 SCCM Controller 2: 1~199 SCCM Controller 3: 1~199 SCCM Controller 4: 1~499 SCCM Touch screen panel to gas delivery parameters  RS485 port is installed for remote control by a PC Customized software is available to match receipts upon request at an extra cost. Range of each MFCs are interchangeable at an extra cost.
Vacuum Pump & Gauge	An anti-corrosion vacuum gauge is included up to 10-5 torr A vacuum pump is required, but not included. Please click the link pics to order  Vacuum gauge  Oil pump     Dry scroll pump
Product dimension	Click the picture to see the detail.
Net weight	~ 500 Kg
Shipping dimension	70" x 70" x 65"
Shipping weight	~600 Kg
Warranty	One year limited warranty for electronic and mechanical part, excluding heating element and ceramic tube damaged by user
Compliance	CE Certified NRTL or CSA certification is available upon request
Schematic Diagram and  Demo Video