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Compact 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller (1200C Max) -OTF-1200X-S-5

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OTF-1200X-S-5 is a compact and energy-saving split tube furnace with a max. the working temperature of 1200°C (Since 2016.11.08) and All electric parts are UL / MET / CSA certified. The furnace adopts a 5" (130mm) O.D quartz tube with a pair of stainless steel vacuum sealing flanges. The 1/4" barb fitting for rubber hose connection allows heating samples in the vacuum or flowing gas.  The temperature controller is seperarated from the furnace with 30 segments of heating and cooling steps with +/- 1 °C accuracy. The furnace can anneal wafer up to 4 "in diameter.   



Furnace Structure
  • Double-layer steel structure.
  • High purity Al2O3 fibrous insulation with Max. energy saving.
  • High purity alumina coating on refractory ceramics for longer service life.
  • This furnace can be modified into many special furnaces ( see the bottom application note)
3 KW
220VAC 50/60Hz
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1000°C (continuous)
Max. Heating Rate
≤ 20 °C/min
Heating Zone Length
  • 12 " (300mm), single zone.
  • Constant Temperature Zone
    • 100 mm length (+/-1ºC ): ( click drawing below for temp profile )
    • 140 mm length (+/-2ºC ): ( click drawing below for temp profile )
Temperature Control
  • PID automatic control via solid-state relay with 30 steps programmable.
  • Built-in Over Temperature and Thermal-couple Failure Protection.
  • Optional: The furnace may be operated by PC with installing a control module. Please order an MTS02-B control module at extra cost.    
Advanced Temperature Controller (Optional)
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo
Tube Size
Vacuum Sealing
Left Flange     Right Flange
Optional Hinged Type Flange at extra cost
  • One pair of SS 304 vacuum flange with double high-temperature silicone O-ring is Included. (With support fixture) (click pic left for detail).
    • KF25 port is built-in the right side flange to connect a vacuum pump.
    • Vacuum gauge, inlet valve, and 1/4 thermal couple feed-through are built-in left side flange.
  • The vacuum level can reach 10-2torr (by a mechanical pump).
  • Option 1:Water cooling 5" flange with Support Fixture,  which allows the furnace to achieve1200°C (Pic 1)
  • Option 2:   Hinged type flange for easy sample loading( Pic.1- 2)
  • Option 3: A second temperature as a monitor can be added with additional cost applied. ( Pic 2)
  • Option 4:For working temp < 500oC, and use it inside the glovebox,  the furnace can short to 500 mm L ( Pic. 3)
  •     pic 1               Pic 2    Pic. 3
Fitting Ports
Optional Parts
  • You may need a vacuum valve at the vacuum port click picture left to order ).
  • You may click the pictures in below to order a furnace with a vacuum pump and a temperature calibration kit.
Pressure Measurement / Monitoring
  • Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa is included.
  • OPTIONAL: A gas-type independent (above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces the risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.   
Optional Insert-able Thermal-couple
  • A K-type insert-able thermocouple can be inserted through the flange to monitor the temperature inside the tube. Click the picture below to order
  • The heating furnace is available for spare and replacement ( click on the right picture below).
  • You may order flange support to avoid tube rotating ( click Pic below right )
  •   Click the picture to see the detail. 
Net Weight of Furnace
48 Kg
Shipping Weight & Dimensions
228 lbs; 48"x40"x37"
One-year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order replacements at related products below.) 
Laptop, software & WiFi Control(Optional)
  • Laptop, software & WiFi Control (Optional) with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based software (EQ-MTS01) enables the user to edit temperature profiles,
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available upon request at an extra cost (up to $1,000). 
  • CE Certified
  • NRTL or CSA certification is available upon request at the extra cost
Application Notes & Warning

  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars. 
  • Vacuum pressures may only be safely used up to 1000°C The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • How to set up a ceramic tube and vacuum flange for MTI tube furnaces.
  • For safety, you may consider putting the small tube furnace inside a fume hood. ( click picture left to see )
  • This furnace can be modified into the vertical,  rotation,  high-temperature ball mill and dip coating ( click picture below to see detail)
Operation Video

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