Super-SPECTROS 150

Features

• Cylindrical chamber
• Large sliding O-ring sealed front door with glove box interface flange
• Available with up to 8 low temperature organic material evaporation sources
• Available with up to 3 metal evaporation sources
• Up to 6" x 6" (150mm x 150mm) substrates
• Turbo molecular or cryogenic pumping
• Fully computer-controlled process automation
• CE Approved

Optional

• Glove box with gas purification system
• Substrate heating to 200°C
• Automated mask changing
• Wedge shaped film growth tool
• Sliding rear door

Lesker Super-SPECTROS 150