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  • Size(mm): 1750(W) x 1585(H) x 750(D)
  • Advanced Semi-Auto System
  • Optimized for graphene, CNT growth
  • Water-cooled end chambers and doors
  • Process Temperature: ~1,100℃
  • Uniformity of Film Thickness: ≤+-3%
  • Testing Uniformity: ≤+-3%
  • Movable furnace method is our unique knowhow for fast heating
  • fast cooling of the sample
  • Standard safety box


  1. hermal CVD Semi-auto Operation system
  2. nd chambers (stainless steel) - water cooled system
  3. as control unit ( Mass flow controller) - 3channel standard + 1 spare
  4. 40liter/min Oil rotary pump
  5. neumatic On/off valve with Down stream Auto pressure control Throttle valve with controller
  6. rogrammable Temperature controller
  7. igh Temperature Furnace(Max1200℃)
  8. apid Cooling system by furnace moving
  9. tmospheric and Vacuum Processing
  10. nti-contamination system by inner tube
  11. acuum gauge unit(Capacitance/Convectron)
  12. year warranty
  13. n-site install and training
  14. afety Cover (Connected exhaust system)
  15. afety interlock system(Water / Air)


  1. Max temp 1500℃ Furnace by SIC source

  2. Rapid thermal processing furnace by IR lamp source

  3. MF power induction heating process Max temp 1600℃

  4. MFC(Mass flow controller) addition total 12channel

  5. Dry vacuum pump ( Scroll / booster / industry)

  6. Gas Safety interlock system for gas leak

  7. RF plasma ( ICP type )

  8. Tungsten filament gas source cracking

  9. Additional Furnace for source evaporation

  10. High Vacuum processing option (Pump/Gauge/valve unit)

  11. Installation in Fume hood

  12. Source delivery system ( Bubbler / Gas / Solid )

  13. System Utility ( Chiller / scrubber / gas cabinet )

  14. System Program ( Auto processing system)

Consumable Parts

  1. K-type Thermocouple (Option : R-type)
  2. Furnace heating element (Furnace repair)
  3. Vacuum sensor
  4. Oil in Rotary Oil Pump
  5. O-ring
  6. Quartz tube

Facility Requirements

Electrical power 220VAC 1ph 30A (35A for +1 furnace)
Compressed air 0.5~0.6Mpa
Compressed air input size 6 mm one touch fitting
Cooling water in/out 3/8" lok fitting
Cooling water pressure 0.1~0.2Mpa
Safety exhaust size 6 mm one touch tube
Gas input pressure 40psi
Gas port 4ch standard (Option 2ch Extension)
Gas port size 1/4"lok fitting
Pump exhaust NW25
Rotary pump capacity 340liter/min
Vent 1/4"lok fitting

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