Phone

(+65) 6284 3818

Email

sales@premier-sols.com

Enquriy
TCVD-D100CA

TCVD-D100CA

0.0/5 rating (0 votes)

Description

Features
  • Size (mm) : 2300(W) x 1770(H) x 750(D)
  • Advanced Computer Controlled Automatic System
  • Optimized for graphene, CNT, h-BN TMDC growth
  • Water-cooled end chambers and doors
  • Process Temperature: ~1,100 ℃
  • Uniformity of Film Thickness : ≤+-3%
  • Testing Uniformity : ≤+-3%
  • Movable furnace method is our unique knowhow for fast heating fast cooling of the sample.

Specifications

  1. Thermal CVD Auto Operation system
  2. Both End chamber(Stainess) - All parts cooling by water
  3. Quartz Main chamber
  4. Gas control unit ( Mass flow controller) - 3channel standard
  5. 340liter/min Oil rotary pump
  6. Pneumatic On/off valve with Down stream Auto pressure control Throttle valve
    with controller
  7. Programmable Temperature controller
  8. High Temperature Furnace(Max1200℃)
  9. Rapid Cooling system by furnace moving
  10. Atmospheric and Vacuum Processing
  11. Anti-contamination system by inner tube
  12. Vacuum gauge unit(Capacitance/Convectron)
  13. 1 year warranty
  14. On-site install and training
  15. System Program ( Auto processing system)
  16. Furnace for source evaporation
  17. Safety interlock system(Water / Air)

Options

  1. Max temp 1500℃ Furnace by SIC source
  2. Rapid thermal processing furnace by IR lamp source
  3. MF power induction heating process Max temp 1600℃
  4. MFC(Mass flow controller) addition total 12channel
  5. Dry vacuum pump ( Scroll / booster / industry)
  6. Gas Safety interlock system for gas leak
  7. RF plasma ( ICP type )
  8. Tungsten filament gas source cracking
  9. High Vacuum processing option
    (Pump/Gauge/valve unit)
  10. Source delivery system ( Bubbler / Gas / Solid )
  11. System Utility ( Chiller / scrubber / gas cabinet )

Consumable Parts

  1. K-type Thermocouple (Option : R-type)
  2. Furnace heating element (Furnace repair)
  3. Vacuum sensor
  4. Oil in Rotary Oil Pump
  5. O-ring
  6. Quartz tube

Share this product

Please type your full name.
Invalid Input
Invalid Input
Invalid Input
Invalid email address.
Invalid Input
Invalid Input
Invalid Input
Invalid Input

Register for new product information:    

Premier Solutions (PS) Pte Ltd Singapore

Please publish modules in offcanvas position.