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The World’s First Affordable 3D Profilometer: The Profilm3D

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Get an optical profilometer for less than half the price of an AFM or 3D stylus profilometer!

The Profilm3D® uses state-of-the-art white light interferometry (WLI) to measure surface profiles and roughness down to 0.05µm; adding the low-cost PSI option takes the minimum vertical feature size down to 0.001µm. The newest generation of the Profilm3D offers Enhanced Roughness Mode for accurately imaging rough surfaces and highly-sloped sidewalls.


affordable and accurate optical profilometry

General Specifications



General Computer Requirements

Configuration Requirements

Objectives* (Nikon CF IC Epi Plan)

*Sold separately
**Pixel size projected on sample


Model Specifications

Model XY Stage Range
Profilm3D 100mm x 100mm
Profilm3D-200 200mm x 200mm


Free! Web-based Analyzer for Profilometer and AFM Images

Drag to rotate these Profilm3D images and scroll to zoom. For a more complete analysis, simply click on an image title to view it with ProfilmOnline® - our free web-based program for viewing, analyzing, and sharing images from any 3D profilometer or AFM!

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