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Thermal Evaporator

Thermal Evaporator

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  • Compact, space-saving design
  • Delivers optimal performance and utilizing top quality sub-components.
  • High speed deposition
  • Ergonomic to operate, easy to clean
  • All stainless steel construction
  • Configured for your application


  • Chamber Unit
    • Material : Stainness304 / Aluminum
    • Chamber size : 350x350x500
    • Front Open Door with Window(shutter)
    • ¼”VCR vent port
    • Pumping port/gauge/spare port
    Pumping Unit(Gauge)
    • Osaka turbo pump 450l/s ISO160 inlet flange
    • 400l/m Rotary pump
    • Ion gauge/convection gauge
    • Capacitance gauge(10torr NW16)
    • ATM sensor
    • Option : Load-lock unit/Cryo pump
    Substrate Unit
    • Material : Inconel600(High temp)
    • Water cooling stage : OFHC
    • Max Sample size : 6inch
    • Option : Up/down / Heating Max temp 400℃ / Rotation by motor/Bias for Cleaning
    Control Unit
    • System Manual operation
    • Option : Semi-auto Operation system -· 15inch Touch panel control· System reciepe· Interlock(Water/Pneumatic air)· Data loading
    Thermal evaporator Unit
    • W, Mo source evaporation boat install
    • Max current 300A( Electrical rod - cooling)
    • Pneumatic shutter for source
    Consumable Parts
    • W-boat
    • thickness sensor
    • Vacuum sensor
    • Oil in Rotary Oil Pump
    • O-ring
    • Window
    • Heating module

Facility Requirements

Electrical power 220VAC 1ph 30A
Compressed air 0.5~0.6Mpa
Compressed air input size 6 mm one touch fitting
Cooling water in/out 3/8" lok fitting
cooling water flow Air temp 5~7liter/min
cooling water pressure 0.1~0.2Mpa
Pump exhaust NW25
Rotary pump capacity 340liter/min
Vent Turbo pump 450l/s
Dry pump exhaust Power 2channel

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