Phone

(+65) 6284 3818

Email

sales@premier-sols.com

Enquriy
Thermal Evaporator

Thermal Evaporator

0.0/5 rating (0 votes)

Description

Features

  • Compact, space-saving design
  • Delivers optimal performance and utilizing top quality sub-components.
  • High speed deposition
  • Ergonomic to operate, easy to clean
  • All stainless steel construction
  • Configured for your application

Specifications

  • Chamber Unit
    • Material : Stainness304 / Aluminum
    • Chamber size : 350x350x500
    • Front Open Door with Window(shutter)
    • ¼”VCR vent port
    • Pumping port/gauge/spare port
    Pumping Unit(Gauge)
    • Osaka turbo pump 450l/s ISO160 inlet flange
    • 400l/m Rotary pump
    • Ion gauge/convection gauge
    • Capacitance gauge(10torr NW16)
    • ATM sensor
    • Option : Load-lock unit/Cryo pump
    Substrate Unit
    • Material : Inconel600(High temp)
    • Water cooling stage : OFHC
    • Max Sample size : 6inch
    • Option : Up/down / Heating Max temp 400℃ / Rotation by motor/Bias for Cleaning
    Control Unit
    • System Manual operation
    • Option : Semi-auto Operation system -· 15inch Touch panel control· System reciepe· Interlock(Water/Pneumatic air)· Data loading
    Thermal evaporator Unit
    • W, Mo source evaporation boat install
    • Max current 300A( Electrical rod - cooling)
    • Pneumatic shutter for source
    Consumable Parts
    • W-boat
    • thickness sensor
    • Vacuum sensor
    • Oil in Rotary Oil Pump
    • O-ring
    • Window
    • Heating module

Facility Requirements

Electrical power 220VAC 1ph 30A
Compressed air 0.5~0.6Mpa
Compressed air input size 6 mm one touch fitting
Cooling water in/out 3/8" lok fitting
cooling water flow Air temp 5~7liter/min
cooling water pressure 0.1~0.2Mpa
Pump exhaust NW25
Rotary pump capacity 340liter/min
Vent Turbo pump 450l/s
Dry pump exhaust Power 2channel

Share this product

Please type your full name.
Invalid Input
Invalid Input
Invalid Input
Invalid email address.
Invalid Input
Invalid Input
Invalid Input
Invalid Input

Register for new product information:    

Premier Solutions (PS) Pte Ltd Singapore

Please publish modules in offcanvas position.