Thick Aluminum Nitride Substrate for RTP Furnace's Sample Holder - EQ-AIN-Holder

Aluminum Nitride Ceramic Substrates Properties

Item No.

AIN-Holder

Purity (wt%)

99% (AN5116)

Density (g/cm³)

   >3.26

Thermal Conductivity (W/m. K)

  >170

Thermal Expansion (x10^-6/^oC)

 <4.2

Dielectric Strength (Kv/mm)

 >15

Dielectric Constant (at 1MHZ)

8.7

Loss Tangent (x10⁴@1 MHz)

  3 - 7

Volume Resistivity (ohm-cm)

     >10¹⁴

Flexural Strength (Kg_f/mm)

  >30

Substrate Specifications

3" or 5" diameter, 0.65mm thickness
surface: fine ground

Product Configuration

The unpolished AIN in the center of holder is able to hold test samples up to 3" or 5" diam.