Phone(+65) 6284 3818 | sales@premier-sols.com | Enquriy |
EQ-CGM-3F-PTFE is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be safer. All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases, such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.
SPECIFICATIONS
Floating meter |
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Valve | Three needle valves made of PTFE material which controls gas outlet on the front panel |
Gas Tank | 500 mL gas tank made of PTFE A built-in gas mixing tank combines and mixes gases from three inlet channels. |
Pipe fitting |
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Dimension |
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Shipping |
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Warranty | Two years limited with lifetime support |
Related Products | CVD & PECVD Furnace Click picture below to order bubbler or evaporator for CVD |
Oxygen Monitoring | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more: |
Application Note |
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Operation Instruction | Operation Manual |