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Three Channel Compact Anti-Corrosion Gas Mixer Made of PTFE (100 -1000 mL/min) - EQ-CGM-3F-PTFE

Three Channel Compact Anti-Corrosion Gas Mixer Made of PTFE (100 -1000 mL/min) - EQ-CGM-3F-PTFE

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EQ-CGM-3F-PTFE is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be safer. All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases, such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.


Floating meter
  • Three anti-corrosive Floating Flow-meter made of PTFE material with flow rates of 100 - 1000 mL/min (0.1 - 1.0 L/min)
  • One Mechanical Pressure Gauge (mixing tank): 0  - 0.05 MPa, (0.02 MPa/grit)
Valve  Three needle valves made of PTFE material which controls gas outlet on the front panel               
Gas Tank  500 mL gas tank made of PTFE
A built-in gas mixing tank combines and mixes gases from three inlet channels.
Pipe fitting
  • Pipe fitting made of PTFE and accept  1/4" pipe (nylon or stainless steel)

  • Three gas inlets with an independent gas flow meter for each channel.
  • 20' length 1/4" PTFE pipe is included for immediate use
  • Compact size:  340Lx300Dx 180H, mm    ( 13.4"x12"x7").
  • Net Weight: 16 Lb
  • Shipping dimension:  TBD
  • Shipping weight: 50 lbs


  Two years limited with lifetime support

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Application Note
  • If your CVD processing involves corrosive gas, such as H2S, please consider using PTFE flange on your tube furnace
  • Also, please choose an anti-corrosion dry vacuum pump instead of an oil vacuum pump
 Operation Manual

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