Phone(+65) 6284 3818 | sales@premier-sols.com | Enquriy |

EQ-CGM-3F-PTFE is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be safer. All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases, such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.
SPECIFICATIONS
| Floating meter |
|
| Valve | Three needle valves made of PTFE material which controls gas outlet on the front panel |
| Gas Tank | 500 mL gas tank made of PTFE A built-in gas mixing tank combines and mixes gases from three inlet channels. |
| Pipe fitting |
|
| Dimension |
|
| Shipping |
|
Warranty | Two years limited with lifetime support |
Related Products | CVD & PECVD Furnace Click picture below to order bubbler or evaporator for CVD |
| Oxygen Monitoring | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:![]() |
| Application Note |
|
| Operation Instruction | Operation Manual |