Three Heating Zones Max. 1200°C Split Vertical Tube Furnace with 2" Quartz Tube & Vacuum Flanges for CVD & CSS - OTF-1200X-50-III-VT-UL

• Double layer steel structure with air cooling to keep case temperature <65°C
• High purity fibrous alumina insulation with Special coating to ensure maximum energy saving
• Foam ceramic blocks with alumina coating are included, which is hanged on top and bottom of flange to protect O-ring from damaged by heat radiation.
• The wheel is installed on the split top cover.

Power

Voltage

Max. Temperature

Continuous Temperature

Max. Heating Rate

Temperature Accuracy

Tube Size and Materials
 

• One 1200mm length quartz tube is included
• OD: 50 mm, ID. 44 mm
• Foam ceramic blocks with alumina coating are included , which is hanged on top of flange to protec O-ring damaged by heat radiation
• Upgrade note:
• ( Processing tube can be replaced by O.D. 50 mm mullite tube at extra cost, then furnace can be used upto 1250°C)

Heating Zone Length

• Top: 135 mm
• Middle: 260 mm
• Bottom: 135 mm
• Total: 530 mm

Constant Temperature Zone

• Constant temperature zone: 400 mm (+/-1°C) if three heating zones are at the same temperature

Temperature Controller

• MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
• Over temperature protection and alarm allows for operation without attendant(s).
• RS485 Communication Port.
• Optional:  
  • The furnace may be operated by PC by installing a control module. Please order a MTS-02 control module at extra cost. 
  • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.

        

• Two stainless steel flanges with vacuum gauge and valves included
  • Gas outlet ( vacuum port ) on top with 1/4" barb connector. 
  • Gas inlet on bottom with 1/4" barb connector
• A hook ring is welded inside the top flange for hanging thermal block or crucible by wireYou may choose any connectors (KF25D adapter, 1/4'' Swagelok Tube Fitting) as shown in the picture left at extra cost.

Vacuum Level

• 10E-2 Torr by mechanical vacuum pump

• 10E-5 Torr by molecular pump

•  Leak rate < 5 mTorr / min.

Heating Element

1300°C Fe-Cr-Al Alloy doped by Mo

Dimensions

500mm(L) x 430mm(W) x 880mm(H) exclude mobile cart
700mm(L) x 700mm(W) x 1680mm(H) install with mobile cart

Net Weight

About 115 kg

Shipping Size

45"(L) x 45"(W) x 50''(H)

Shipping Weight

320 lbs

Warranty

• CE Certified
• All electric components ( >24V) are UL / MET / CSA certified
• The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. 

                     

Application Note ( We may help you to build customized flange to meet your application at extra cost )

• Customers may calibrate temperature before use to obtain accurate temperature inside tube furnace, please click here to learn how.
• Please click picture below to learn how to quench sample in gas flow and vacuum
  • Approach#1: Traditional wire cut and free-falling  ( Fig. 1 & 2 )
  • Approach#2: Electromagnetic release and free-falling. (Fig 3 & 4 )

                        
                     Fig. 1                Fig. 2                                Fig. 3                           Fig. 4 

• The furnace ca be modified into a HPCVD ( hybrid physical-chemical vapor deposition ) furnace via DIY a sample susceptor ( click picture below-left to see how )
• The furnace can be used for brazing of two flat < 1"diameter sample via top dead weight under vacuum at <1000° ( click picture below -right to see how )
•               

Operation Instructions

 Warning

Click here to learn more about the installation of a gas regulator.

• The tube furnaces with quartz tube are designed for using under vacuum and low pressure <0.2 bar / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gases should be limited to < 200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.
• Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.